@conference{779541,
  author = {Richard Allen and C. Schuster},
  title = {An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes},
  year = {1993},
  month = {1993-12-31 00:12:00},
  publisher = {Proc., Government Microcircuit Applications Conference (GOMAC) 1993, New Orleans, LA, USA},
  language = {en},
}