TY  - CONF
AU  - Richard Allen
AU  - C. Schuster
C2  - Proc., Government Microcircuit Applications Conference (GOMAC) 1993, New Orleans, LA, USA
DA  - 1993-12-31 00:12:00
LA  - en
PB  - Proc., Government Microcircuit Applications Conference (GOMAC) 1993, New Orleans, LA, USA
PY  - 1993
TI  - An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes
ER  -