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Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System

Published

Author(s)

Michael W. Cresswell, Richard A. Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E C. Teague
Proceedings Title
Proc., IEEE Conference on Microelectronic Test Structures
Conference Dates
March 22-25, 1993
Conference Location
Sitges, 1, SP

Citation

Cresswell, M. , Allen, R. , Linholm, C. , Hood, C. , Penzes, W. and Teague, E. (1993), Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System, Proc., IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP (Accessed May 17, 2024)

Issues

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Created December 30, 1993, Updated October 12, 2021