NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System

Published

Author(s)

Michael W. Cresswell, Richard A. Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E C. Teague
Proceedings Title
Proc., IEEE Conference on Microelectronic Test Structures
Conference Dates
March 22-25, 1993
Conference Location
Sitges, 1, SP
Pub Type
Conferences

Citation

Cresswell, M. , Allen, R. , Linholm, C. , Hood, C. , Penzes, W. and Teague, E. (1993), Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System, Proc., IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP (Accessed October 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1993, Updated October 12, 2021
Was this page helpful?