TY  - CONF
AU  - Michael Cresswell
AU  - Richard Allen
AU  - C. Linholm
AU  - Colleen Hood
AU  - William Penzes
AU  - E Teague
C2  - Proc.,  IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP
DA  - 1993-12-31 00:12:00
LA  - en
PB  - Proc.,  IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP
PY  - 1993
TI  - Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System
ER  -