@conference{846826,
  author = {Michael Cresswell and Richard Allen and C. Linholm and Colleen Hood and William Penzes and E Teague},
  title = {Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System},
  year = {1993},
  month = {1993-12-31 00:12:00},
  publisher = {Proc.,  IEEE Conference on Microelectronic Test Structures, Sitges, 1, SP},
  language = {en},
}