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Nanotechnology

Nanometrology

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Displaying 451 - 475 of 855

Fourier Domain Optical Tool Normalization for Quantitative Parametric Image Reconstruction

September 5, 2013
Author(s)
Jing Qin, Richard M. Silver, Bryan M. Barnes, Hui Zhou, Francois R. Goasmat
There has been much recent work in developing advanced optical metrology methods that use imaging optics for critical dimension measurements and defect detection. Sensitivity to nanometer scale changes has been observed when measuring critical dimensions

Influence of Network Bond Percolation on the Thermal, Mechanical, Electrical and Optical Properties of high and low-k a-SiC:H Thin Films

August 25, 2013
Author(s)
Gheorghe Stan, Sean King, Jeff Bielefeld, Gaunghai Xu, William Lanford, Yusuke Matsuda, Reinhold Dauskardt, Jonathan F. Stebbins, Donald Hondongwa, Lauren Olasov, Brian Daly, Ming Liu, Dhanadeep Dutta, David W. Gidley
As demand for lower power and higher performance nano-electronic products increases, the semiconductor industry must adopt insulating materials with progressively lower dielectric constants (i.e. low-k) in order to minimize capacitive related power losses

Temperature-Programmed Electrospray-Differential Mobility Analysis for Characterization of Ligated Nanoparticles in Complex Media

August 12, 2013
Author(s)
De-Hao D. Tsai, Frank W. DelRio, John M. Pettibone, Pin A. Lin, Jiaojie Tan, Michael R. Zachariah, Vincent A. Hackley
In this study, an electrospray-differential mobility analyzer (ES-DMA) was operated with an aerosol flow-mode, temperature-programmed approach to enhance its ability to characterize the particle size distributions (PSDs) of nanoscale particles (NPs) in the

Through-focus scanning optical microscopy for defect inspection of EUV masks

August 12, 2013
Author(s)
Ravikiran Attota, Vibhu Jindal
The TSOM method provides three-dimensional nanoscale metrology using a conventional optical microscope. Substantial improvements in defect detectability using the TSOM method will be presented. The TSOM method shows potential to (i) detect phase defects on

Cold atomic beam ion source for focused ion beam applications

July 23, 2013
Author(s)
Brenton J. Knuffman, Adam V. Steele, Jabez J. McClelland
We report measurements and modeling performed on an ion source based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam (FIB) systems. Our

Thermoelectric imaging of structural disorder in epitaxial graphene

July 14, 2013
Author(s)
Sanghee Cho, Stephen D. Kang, Wondong Kim, Eui-Sup Lee, Sung-Jae Woo, Ki-Jeong Kong, Ilyou Kim, Hyeong-Do Kim, Tong Zhang, Joseph A. Stroscio, Yong-Hyun Kim, Ho-Ki Lyeo
Many structural defects and strain fields develop during the preparation of thin films and nanostructures, with their origins being at the atomic level1,2. Sensitively detecting these subtle features with high sensitivity and resolution, and their

What's in a 'NYM?

July 1, 2013
Author(s)
Robert R. Keller
The field of electron microscopy, by its very diverse nature, abounds with acronyms: AEM, EF-TEM, ESEM, FE-SEM, HREM, HRTEM, HVEM, SEM, STEM, TEM, and VP-SEM, to name some instruments alone. Add in the different forms of data that these instruments might

On the Field Evaporation Behavior of c-axis GaN Nanowires in Laser-Pulsed Atom Probe Tomography

June 26, 2013
Author(s)
Matthew D. Brubaker, Kristine A. Bertness, Norman A. Sanford, Brian Gorman, David R. Diercks, R Kirchofer
GaN has seen use in many applications such as photovoltaics, blue and ultraviolet lasers, and light-emitting diodes with additional research into expanded and new applications. GaN in the form of nanowires present additional possibilities due to their high

Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection

June 24, 2013
Author(s)
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo
Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.

Cubic Silsesquioxanes as Tunable High Performance Coating Materials

June 19, 2013
Author(s)
Christopher Soles, Hyun W. Ro, Aaron Forster, Dave J. Krug, Vera Popova, Richard M. Laine
In this manuscript a series of cubic silsequioxane monomers with their eight vertices functionalized with different organic ligands terminated with triethoxysilane groups were acid hydrolyzed, spin cast into thin films, and then vitrified into hard

High-Resolution Photocurrent Microscopy Using Near-Field Cathodoluminescence of Quantum Dots

June 10, 2013
Author(s)
Heayoung Yoon, Youngmin Lee, Christopher C. Bohn, Seung H. Ko, Anthony G. Gianfrancesco, Jonathan S. Steckel, Seth Coe-Sullivan, Albert A. Talin, Nikolai B. Zhitenev
We report a fast, versatile photocurrent imaging technique to visualize the local photo response of solar energy devices and optoelectronics using near-field cathodoluminescence (CL) from a homogeneous quantum dot layer. This approach is quantitatively

Surface mediated assembly of small, metastable gold nanoclusters

May 27, 2013
Author(s)
John M. Pettibone, William A. Osborn, Konrad Rykaczewski, Albert A. Talin, John E. Bonevich, Jeffrey W. Hudgens
The unique properties of metallic nanoclusters are attractive for numerous commercial and industrial applications but are generally less stable than nanocrystals. Thus, developing methodologies for stabilizing nanoclusters and retaining their enhanced
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