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Cold atomic beam ion source for focused ion beam applications

Published

Author(s)

Brenton J. Knuffman, Adam V. Steele, Jabez J. McClelland

Abstract

We report measurements and modeling performed on an ion source based on ionization of a laser-cooled atomic beam. We show a high brightness and a low energy spread, suitable for use in next-generation, high-resolution focused ion beam (FIB) systems. Our measurements of total ion current as a function of ionization conditions support a model that also predicts the cross-sectional current density and spatial distribution of ions created in the source. The model predicts a peak brightness of 2×107 Am 2sr 1eV 1 and an energy spread
Citation
Japanese Journal of Applied Physics
Volume
114
Issue
4

Keywords

focused ion beams, cold atoms, laser cooling
Created July 23, 2013, Updated November 10, 2018