@article{815576,
  author = {Brenton Knuffman and Adam Steele and Jabez McClelland},
  title = {Cold atomic beam ion source for focused ion beam applications},
  year = {2013},
  number = {114},
  month = {2013-07-23 00:07:00},
  publisher = {Japanese Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913784},
  doi = {https://doi.org/10.1063/1.4816248  },
  language = {en},
}