NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection
Published
Author(s)
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo
Abstract
Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
Proceedings Title
OSA Technical Digest
Conference Dates
June 23-27, 2013
Conference Location
Alexandria, VA
Conference Title
Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)
Barnes, B.
, Sohn, M.
, Goasmat, F.
, Zhou, H.
, Silver, R.
and Arceo, A.
(2013),
Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection, OSA Technical Digest, Alexandria, VA
(Accessed October 11, 2025)