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Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection



Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo


Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
Proceedings Title
OSA Technical Digest
Conference Dates
June 23-27, 2013
Conference Location
Alexandria, VA
Conference Title
Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)


Industrial inspection, Three-dimensional image processing, optical metrology


Barnes, B. , Sohn, M. , Goasmat, F. , Zhou, H. , Silver, R. and Arceo, A. (2013), Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection, OSA Technical Digest, Alexandria, VA (Accessed November 29, 2023)
Created June 24, 2013, Updated February 19, 2017