Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection
Bryan M. Barnes, Martin Y. Sohn, Francois R. Goasmat, Hui Zhou, Richard M. Silver, Abraham Arceo
Experimental imaging at =193 nm of sub-resolved defects performed at several focus positions yields a volume of spatial and intensity data. Defects are located in a differential volume, given a reference, with up to 5x increase in sensitivity.
OSA Technical Digest
June 23-27, 2013
Applied Industrial Optics: Spectroscopy, Imaging, and Metrology (AIO)
, Sohn, M.
, Goasmat, F.
, Zhou, H.
, Silver, R.
and Arceo, A.
Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection, OSA Technical Digest, Alexandria, VA
(Accessed November 29, 2023)