@conference{25676,
  author = {Bryan Barnes and Martin Sohn and Francois Goasmat and Hui Zhou and Richard Silver and Abraham Arceo},
  title = {Harnessing 3D Scattered Optical Fields for sub-20 nm Defect Detection},
  year = {2013},
  month = {2013-06-24},
  publisher = {OSA Technical Digest, Alexandria, VA},
  language = {en},
}