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Nanotechnology

Nanometrology

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Displaying 426 - 450 of 866

2013 ITRS Metrology Roadmap

April 15, 2014
Author(s)
Alain C. Diebold, Ndubuisi Orji
In 2013 the ITRS Metrology Technical Working Group worked on updating the text and tables of the metrology chapter. New additions include a section on 3D nanometrology, a revised lithography metrology table, and an updated Interconnect section. The

Optimizing Hybrid Metrology through a Consistent Multi-Tool Parameter Set and Uncertainty Model

April 14, 2014
Author(s)
Richard M. Silver, Bryan Barnes, Nien F. Zhang, Hui Zhou, Andras Vladar, John S. Villarrubia, Regis J. Kline, Daniel Sunday, Alok Vaid
There has been significant interest in hybrid metrology as a novel method for reducing overall measurement uncertainty and optimizing measurement throughput (speed) through rigorous combinations of two or more different measurement techniques into a single

Optical volumetric inspection of sub-20 nm patterned defects with wafer noise

April 2, 2014
Author(s)
Bryan M. Barnes, Francois R. Goasmat, Martin Y. Sohn, Hui Zhou, Richard M. Silver, Andras Vladar, Abraham Arceo
We have previously introduced a new data analysis method that more thoroughly utilizes scattered optical intensity data collected during defect inspection using bright-field microscopy. This volumetric approach allows conversion of focus resolved 2-D

Establishing an upper bound on contact resistivity of ohmic contacts to n-GaN nanowires

April 1, 2014
Author(s)
Paul T. Blanchard, Kristine A. Bertness, Todd E. Harvey, Norman A. Sanford
Contact resistivity ρ c is an important figure of merit in evaluating and improving the performance of electronic and optoelectronic devices. Due to the small size, unique morphology, and uncertain transport properties of semiconductor nanowires (NWs)

Twin Plane Re-entrant Mechanism for Catalytic Nanowire Growth

March 12, 2014
Author(s)
Andrew D. Gamalski, Peter W. Voorhees, Renu Sharma, Caterina Ducati, Stephan Hofmann
We observe a twin plane re-entrant based growth mechanism for Au catalyzed Ge nanowire growth using video-rate lattice-resolved environmental transmission electron microscopy. For a [112] growth direction, we find a convex, V-shaped liquid catalyst

Visualizing Nanoparticle Dissolution by Imaging Mass Spectrometry

March 10, 2014
Author(s)
Christopher W. Szakal, Melissa S. Ugelow, Justin M. Gorham, Andrew R. Konicek, Richard D. Holbrook
We demonstrate the ability to visualize nanoparticle dissolution while simultaneously providing chemical signatures that differentiate between citrate-capped silver nanoparticles (AgNPs), AgNPs forced into dissolution via exposure to UV radiation, silver

Controlled Formation and Characterization of Dithiothreitol-Conjugated Gold Nanoparticle Clusters

March 5, 2014
Author(s)
De-Hao D. Tsai, Tae Joon Cho, Frank W. DelRio, Justin Gorham, Jiwen Zheng, Jiaojie Tan, Michael R. Zachariah, Vincent A. Hackley
We report a systematic study of the controlled formation of discrete-size gold nanoparticle clusters (GNCs) by interaction with the reducing agent dithiothreitol (DTT). Asymmetric-flow field flow fractionation and electrospray differential mobility

Capabilities of Single Particle Inductively Coupled Plasma Mass Spectrometry for the Size Measurement of Nanoparticles: A Case Study on Gold Nanoparticles

February 28, 2014
Author(s)
Jingyu Liu, Karen E. Murphy, Robert I. MacCuspie, Michael R. Winchester
The increasing application of engineered nanomaterials in consumer and medical products has motivated the development of single particle inductively coupled plasma mass spectrometry (spICP-MS) for characterizing nanomaterials under realistic environmental

Nanoscale mechanics by tomographic contact resonance atomic force microscopy

January 23, 2014
Author(s)
Gheorghe NMN Stan, Santiago Solares, Bede Pittenger, Natalia Erina, Chanmin Su
We report on a quantifiable depth-dependent contact resonance AFM (CR-AFM) measurements over polystyrene-polypropylene (PS-PP) polymer blends to detail surface and sub-surface features in terms of elastic modulus and mechanical dissipation. The depth

Saponins: A sustainable surfactant. From its microwave-assisted extraction to the synthesis of monodisperse latices

January 21, 2014
Author(s)
Charlene Schnitt, Bruno Grassl, Julien C. Gigault, Vincent A. Hackley, Gaetane Lespes, Jacques Desbrieres, Virginie Pellerin, Stephanie Reynaud
Synthetic surfactants are widely used in emulsion polymerization, but it is increasingly desirable to replace them with naturally derived molecules with a reduced environmental burden. This study demonstrates the use of saponins as sustainable and

SPRITE: A modernized approach to scanning probe contact resonance imaging

January 20, 2014
Author(s)
Anthony B. Kos, Jason P. Killgore, Donna C. Hurley
We describe a system for contact resonance tracking called Scanning Probe Resonance Image Tracking Electronics (SPRITE). SPRITE can image two contact resonance frequencies simultaneously and thus can be used to acquire quantitative mechanical properties

Three-Dimensional Hydrogel Constructs for Dosing Cells with Nanoparticles

January 13, 2014
Author(s)
Elisabeth Mansfield, Tammy L. Oreskovic, Nikki S. Rentz, Kavita M. Jeerage
In evaluating nanoparticle risks to human health, there is often a disconnect between results obtained from in vitro toxicology studies and in vivo activity, prompting the need for improved methods to rapidly assess the hazards of engineered nanomaterials

Epitaxial Si encapsulation of highly misfitting SiC quantum dot arrays formed on Si (001)

January 8, 2014
Author(s)
Christopher W. Petz, Dongyue Yang, Alline Myers, Jeremey Levy, Jerrold Floro
This work examines Si overgrowth to encapsulate 3C-SiC quantum dot arrays epitaxially grown on Si substrates. Using transmission electron microscopy we show how the crystalline quality of the Si cap depends on the growth conditions. Overgrowth at 300ºC

Development of a conceptual framework for evaluation of nanomaterials release from nanocomposites: environmental and toxicological implications

January 2, 2014
Author(s)
Jame Ging, Raul Tejerina-Anton, Girish Ramakrishnan, Mark Nielsen, Kyle Murphy, Justin Gorham, Tinh Nguyen, Alexander Orlov
Despite the fact that nanomaterials are considered potentially hazardous in a freely dispersed form, they are often considered safe when encapsulated into a polymer matrix. However, systematic research to confirm the abovementioned paradigm is lacking

Comparison of atom probe compositional fidelity across thin film interfaces

January 1, 2014
Author(s)
Andrew Herzing, Justin G. Brons, Karen T. Henry, Ian M. Anderson, Gregory B. Thompson
A series of Fe/Ni and Ti/Nb multilayers with bilayer repeat distances of approximately 4 nm have been sputter-deposited onto n-doped Si [001] substrates. The films were focus ion beam milled into the required needle-shaped geometry for atom probe analysis

Statistical Sampling of Carbon Nanotube Populations by Thermogravimetric Analysis

December 25, 2013
Author(s)
Elisabeth Mansfield, Aparna Kar, Chih-Ming Wang, Ann C. Chiaramonti Debay
Carbon nanotubes are one of the most promising nanomaterials on the market, with applications in electronics devices, sensing, batteries, composites and medical communities. Strict control of the carbon nanotube chemistry and properties is necessary as the

Dynamic contact AFM methods for nanomechanical properties

December 1, 2013
Author(s)
Donna C. Hurley, Jason P. Killgore
This chapter focuses on two atomic force microscopy (AFM) methods for nanomechanical characterization: force modulation microscopy (FMM) and contact resonance (CR) techniques. FMM and CR methods share several common features that distinguish them from

Accurate Spring Constant Calibration for very Stiff Atomic Force Microscopy Cantilevers

November 26, 2013
Author(s)
Scott Grutzik, Richard S. Gates, Yvonne B. Gerbig, Douglas T. Smith, Robert F. Cook, Alan Zehnder
There are many atomic force microscopy (AFM) applications that rely on quantifying the force between the AFM cantilever tip and the sample. The AFM does not explicitly measure force, however, so in such cases knowledge of the cantilever stiffness is
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