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Conferences

A Numerical Method for Color Uncertainty

Author(s)
Yoshihiro Ohno
A method for calculating uncertainties of color quantities has been developed using a numerical approach based on the ISO Guide to the Expression of Uncertainty...

SEM Sentinel - SEM Performance Measurement System

Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, M A. Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope...

Kinematic Modeling and Analysis of a Planar Micro-Positioner

Author(s)
Nicholas G. Dagalakis, John A. Kramar, E Amatucci, Robert Bunch
The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work...

Overlay Metrology: Recent Advances and Future Solutions

Author(s)
Richard M. Silver, Jay S. Jun, S Fox, Edward A. Kornegay
As devices shrink and clock speeds continue to increase, process control and measurement of I critical dimension linewidths and the essential overlay of...

Neolithography Consortium: A Progress Report

Author(s)
James E. Potzick
The role of process simulation is becoming an increasingly important part of microlithography process control and photomask metrology as wafer feature sizes...

Single-frequency and Mode-locked Er/Yb Co-doped Waveguide Lasers

Author(s)
Berton Callicoatt, John B. Schlager, Kevin L. Silverman, Robert K. Hickernell, Richard P. Mirin, Norman A. Sanford, Joseph S. Hayden, Samuel D. Conzone, Robert D. Simpson
We present results for single-frequency and mode-locked Er/Yb co-doped waveguide lasers. The single-frequency DBR waveguide lasers have output power in excess...

Wavelength standards for optical communications

Author(s)
Sarah L. Gilbert, William C. Swann, Tasshi Dennis
We review wavelength accuracy and calibration issues for wavelength division multiplexed (WDM) optical fiber communication and describe our work on wavelength...

Evolution of the Shapes of InAs and InGaAs Quantum Dots

Author(s)
Richard P. Mirin, Alexana Roshko, M. van der Puijl, Andrew G. Norman
The exact shape of self-assembled quantum dots is still a controversial subject in the literature, despite the fact that this knowledge is of paramount...

Method of Measuring Shunt Resistance of Photodiodes

Author(s)
P R. Thompson, Thomas C. Larason
A method of measuring the shunt resistance of diodes, specifically photodiodes, is examined and the procedure of how the method is implemented using LabVIEW is...
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