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Low Voltage Microanalysis using Microcalorimeter EDS
Published
Author(s)
David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, John M. Martinis, Martin Huber, Dale Newbury
Abstract
We present the current performance of the prototype high-resolution microcalorimeter energy-dispersive spectrometer (υcal EDS) developed at NIST for x-ray microanalysis. In particular, the low-energy υcal EDS designed for operation in the energy range from 0.2 keV to 2 keV, offers significant advantages for low-beam voltage (high-spatial-resolution) x-ray microanalysis for critical applications in the semiconductor industry such as particle analysis. We present several examples in which the low-energy υcal EDS has successfully solved problems important to the semiconductor industry, including analyses of small contaminant particles (Al, Al oxide, Cu) and thin films (TiN, TiO2, o.5 wt.% Cu in Al). We also describe the future development of a large-format microcalorimeter array with significantly improved total effective area and total count rate.
Proceedings Title
Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech.
Wollman, D.
, Nam, S.
, Hilton, G.
, Irwin, K.
, Rudman, D.
, Bergren, N.
, Deiker, S.
, Martinis, J.
, Huber, M.
and Newbury, D.
(2001),
Low Voltage Microanalysis using Microcalorimeter EDS, Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech., Gaithersburg, MD, USA
(Accessed October 8, 2025)