@conference{769831,
  author = {David Wollman and Sae Nam and Gene Hilton and Kent Irwin and David Rudman and Norman Bergren and Steven Deiker and John Martinis and Martin Huber and Dale Newbury},
  title = {Low Voltage Microanalysis using Microcalorimeter EDS},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Proc., 2000 Intl Conf. Characterization & Metrology for ULSI Tech., Gaithersburg, MD, USA},
  language = {en},
}