Dowell, M.
, Cromer, C.
, Jones, R.
, Keenan, D.
and Scott, T.
(2001),
New Developments in Deep Ultraviolet Laser Metrology for Photolithography, AIP Conf. Proc., Characterization and Metrology for ULSI Technology 2000, Gaithersburg, MD, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=17492
(Accessed April 26, 2024)
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New Developments in Deep Ultraviolet Laser Metrology for Photolithography
Published
Author(s)
, , , , Thomas Scott
Abstract
Current and future laser measurement services at 157, 193, and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented, electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.Proceedings Title
AIP Conf. Proc., Characterization and Metrology for ULSI Technology 2000
Volume
550
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Download Paper
Keywords
laser metrology, UV lithography
Citation
Created December 31, 2000, Updated October 12, 2021