@conference{765296,
  author = {Marla Dowell and Christopher Cromer and Richard Jones and Darryl Keenan and Thomas Scott},
  title = {New Developments in Deep Ultraviolet Laser Metrology for Photolithography},
  year = {2001},
  number = {550},
  month = {2001-01-01 00:01:00},
  publisher = {AIP Conf. Proc., Characterization and Metrology for ULSI Technology 2000, Gaithersburg, MD, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=17492},
  language = {en},
}