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Challenges of Metrology and Characterization Measurements for ULSI Technology

Published

Author(s)

David G. Seiler, Thomas J. Shaffner
Proceedings Title
Proc., 4th RIPE Symposium
Conference Dates
November 20-24, 2000
Conference Location
Tokyo, 1, JA
Conference Title
4th RIPE Symposium

Citation

Seiler, D. and Shaffner, T. (2001), Challenges of Metrology and Characterization Measurements for ULSI Technology, Proc., 4th RIPE Symposium, Tokyo, 1, JA (Accessed March 3, 2024)
Created December 31, 2000, Updated October 12, 2021