@conference{764826,
  author = {David Seiler and Thomas Shaffner},
  title = {Challenges of Metrology and Characterization Measurements for ULSI Technology},
  year = {2001},
  month = {2001-01-01 00:01:00},
  publisher = {Proc., 4th RIPE Symposium, Tokyo, 1, JA},
  language = {en},
}