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Effects of Wafer Emissivity on Lightpipe Radiometry in RTP Tools

Published

Author(s)

K G. Kreider, David W. Allen, D H. Chen, D P. DeWitt, C W. Meyer, Benjamin K. Tsai
Conference Location
, 1, SC
Conference Title
9th Intl. Conf. Advanced Thermal Processing of Semiconductors

Citation

Kreider, K. , Allen, D. , Chen, D. , DeWitt, D. , Meyer, C. and Tsai, B. (2001), Effects of Wafer Emissivity on Lightpipe Radiometry in RTP Tools, 9th Intl. Conf. Advanced Thermal Processing of Semiconductors , , 1, SC (Accessed May 30, 2024)

Issues

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Created December 31, 2000, Updated October 12, 2021