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Conferences

Analyzing Broadband Free-Field, Absorber Measurements

Author(s)
David R. Novotny, Robert T. Johnk, Arthur Ondrejka
We present and analyze a method for free-field evaluation of broadband absorber in a non-ideal testing environment. Using broadband, short-impulse TEM horns, a

Characterization of Thin and Ultrathin Polymer and Resist Films

Author(s)
D L. Goldfarb, Q Lin, M Angelopoulos, Christopher Soles, Eric K. Lin, Wen-Li Wu
The need for a better understanding of the physicochemical properties of radiation-sensitive thin polymer coatings for lithographic applications is driven by

The Art and Science of Lamp Photometry

Author(s)
R S. Bergman, Yoshi Ohno
This paper first overviews photometric quantities of lamps - luminous flux, luminous intensity, illuminance, and luminance - and general techniques for

SEM Sentinel-SEM Performance Measurement System

Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, Alkan Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope

Properties of Cavity-Backed Slot-Ring Antennas at 95 GHZ

Author(s)
Shalva Nolen, Todd E. Harvey, Carl D. Reintsema, Erich N. Grossman
Slot-ring antennas with planar backshorts, designed for operation at 95 GHz, have been fabricated and their properties measured. Using optical lithography, we

Design of an Active MM-Wave Concealed Object Imaging System

Author(s)
Nicholas Paulter, Erich N. Grossman, Gerard N. Stenbakken, Bryan C. Waltrip, Shalva Nolen, Carl D. Reintsema
The research and design of an active millimeter-wave concealed object imaging system is described. Several illumination and detection methods were analyzed via

Basic Procedures in Force Calibration at NIST

Author(s)
Ricky L. Seifarth, Samuel L. Ho
Force calibrations obtainable at the National Institute of Standards and Technology (NIST) continue to focus on extracting the maximum performance from the

The Policy Machine for Security Policy Management

Author(s)
Chung Tong Hu, Deborah A. Frincke, David F. Ferraiolo
Many different access controls policies and models have been developed to suit a variety of goals: these include Role-Based Access Control, One-directional

Modeling Technology for a Model-Intensive Enterprise

Author(s)
Michael Gruninger, David W. Flater, Peter O. Denno
The Object Management Group (OMGtm) is defining specifications supporting a modeling environment that permits models from a family of modeling languages to
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