Reference Material 8091: New Scanning Electron Microscope Sharpness Standard
Andras Vladar, Michael T. Postek, Nien F. Zhang, Robert D. Larrabee, Samuel N. Jones, Russell E. Hajdaj
Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly onto a wafer, wafer piece or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope. The chip can also be mounted onto a drop-in type wafer holder. This Reference Material is fully compatible with state-of-the-art integrated circuit technology.
Proceedings of SPIE
February 26, 2001
Santa Clara, CA
Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor
CD, CD-SEM, measurement, metrology, performance, reference material, scanning electron microscope, SEM, standard
, Postek, M.
, Zhang, N.
, Larrabee, R.
, Jones, S.
and Hajdaj, R.
Reference Material 8091: New Scanning Electron Microscope Sharpness Standard, Proceedings of SPIE, Santa Clara, CA
(Accessed June 2, 2023)