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Reference Material 8091: New Scanning Electron Microscope Sharpness Standard

Published

Author(s)

Andras Vladar, Michael T. Postek, Nien F. Zhang, Robert D. Larrabee, Samuel N. Jones, Russell E. Hajdaj

Abstract

Reference Material (RM 8091) is intended primarily for use in checking the sharpness performance of scanning electron microscopes. It is supplied as a small, approximately 2 mm x 2 mm diced semiconductor chip. This sample is capable of being mounted directly onto a wafer, wafer piece or specimen stub for insertion into a laboratory or wafer inspection scanning electron microscope. The chip can also be mounted onto a drop-in type wafer holder. This Reference Material is fully compatible with state-of-the-art integrated circuit technology.
Proceedings Title
Proceedings of SPIE
Conference Dates
February 26, 2001
Conference Location
Santa Clara, CA
Conference Title
Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor

Keywords

CD, CD-SEM, measurement, metrology, performance, reference material, scanning electron microscope, SEM, standard

Citation

Vladar, A. , Postek, M. , Zhang, N. , Larrabee, R. , Jones, S. and Hajdaj, R. (2001), Reference Material 8091: New Scanning Electron Microscope Sharpness Standard, Proceedings of SPIE, Santa Clara, CA (Accessed February 28, 2024)
Created August 1, 2001, Updated February 19, 2017