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Conferences

Electronic Display Metrology--Not a Simple Matter

Author(s)
Edward F. Kelley
Most would assume that the characterization of electronic display quality would be a straightforward process offering few complications. However, what the eye

Silicon Single Atom Steps as AFM Height Standards

Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Joseph Fu, V W. Tsai, E. C. Williams, Theodore V. Vorburger, H Edwards, D Cook, P West, R Nyffenegger
Atomic force microscopes (AFMs) are used in the semiconductor industry for a variety of metrology purposes. Step height measurements at the nanometer level and

Understanding TREC Results - the Role of Statistics

Author(s)
Walter S. Liggett Jr, Paul D. Over
The challenge in empirical development of information retrieval systems at TREC is obtaining general conclusions from IR system responses to a sample of perhaps

Publication and Use of Large Data Sets

Author(s)
J R. Rumble
Scientific information comes in many sizes, types and quality. Because of diversity of the scientific information being published, different issues will arise

Characterization of Thin and Ultrathin Polymer and Resist Films

Author(s)
D L. Goldfarb, Q Lin, M Angelopoulos, Christopher Soles, Eric K. Lin, Wen-Li Wu
The need for a better understanding of the physicochemical properties of radiation-sensitive thin polymer coatings for lithographic applications is driven by

The Art and Science of Lamp Photometry

Author(s)
R S. Bergman, Yoshi Ohno
This paper first overviews photometric quantities of lamps - luminous flux, luminous intensity, illuminance, and luminance - and general techniques for

SEM Sentinel-SEM Performance Measurement System

Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, Alkan Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope

Properties of Cavity-Backed Slot-Ring Antennas at 95 GHZ

Author(s)
Shalva Nolen, Todd E. Harvey, Carl D. Reintsema, Erich N. Grossman
Slot-ring antennas with planar backshorts, designed for operation at 95 GHz, have been fabricated and their properties measured. Using optical lithography, we

Design of an Active MM-Wave Concealed Object Imaging System

Author(s)
Nicholas Paulter, Erich N. Grossman, Gerard N. Stenbakken, Bryan C. Waltrip, Shalva Nolen, Carl D. Reintsema
The research and design of an active millimeter-wave concealed object imaging system is described. Several illumination and detection methods were analyzed via

Analyzing Broadband Free-Field, Absorber Measurements

Author(s)
David R. Novotny, Robert T. Johnk, Arthur Ondrejka
We present and analyze a method for free-field evaluation of broadband absorber in a non-ideal testing environment. Using broadband, short-impulse TEM horns, a

Basic Procedures in Force Calibration at NIST

Author(s)
Ricky L. Seifarth, Samuel L. Ho
Force calibrations obtainable at the National Institute of Standards and Technology (NIST) continue to focus on extracting the maximum performance from the

The Policy Machine for Security Policy Management

Author(s)
Chung Tong Hu, Deborah A. Frincke, David F. Ferraiolo
Many different access controls policies and models have been developed to suit a variety of goals: these include Role-Based Access Control, One-directional

Electrometrology and NIST -- New Directions

Author(s)
William E. Anderson
I gaze into a somewhat cloudy crystal ball to predict the directions of electrical metrology in the next fifteen years. The emphasis on standards based on
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