Dixson, R.
, Orji, N.
, Fu, J.
, Tsai, V.
, , E.
, Vorburger, T.
, Edwards, H.
, Cook, D.
, West, P.
and Nyffenegger, R.
(2001),
Silicon Single Atom Steps as AFM Height Standards, Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
(Accessed December 11, 2024)