TY  - CONF
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - Joseph Fu
AU  - V Tsai
AU  - E.
AU  - Theodore Vorburger
AU  - H Edwards
AU  - D Cook
AU  - P West
AU  - R Nyffenegger
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
DA  - 2001-08-01
LA  - en
M1  - 4344
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA
PY  - 2001
TI  - Silicon Single Atom Steps as AFM Height Standards
ER  -