@conference{190761,
  author = {Ronald Dixson and Ndubuisi Orji and Joseph Fu and V Tsai and E. and Theodore Vorburger and H Edwards and D Cook and P West and R Nyffenegger},
  title = {Silicon Single Atom Steps as AFM Height Standards},
  year = {2001},
  number = {4344},
  month = {2001-08-01},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XV, Neal T. Sullivan, Editor, Santa Clara, CA},
  language = {en},
}