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Progress Towards Arrays of Microcalorimeter X-ray Detectors



Sae Woo Nam, David A. Wollman, Dale Newbury, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Steven Deiker, Norman F. Bergren, John M. Martinis


The high performance of single-pixel microcalorimeter EDS (υcal EDS) has been shown to be very useful for a variety of microanalysis cases. The primary advantage of υcal EDS over conventional EDS is that factor of 25 improvement in energy resolution (3 eV in real-time). This level of energy resolution is particularly important for applications such as nanoscale contaminant analysis where it is necessary to resolve peak overlaps at low x-ray energies. Because υcal EDS offer practical solutions to many microanalysis problems, several companies are proceeding with commercialization of single-pixel υcal EDS technology. Two drawbacks limiting the application of υcal EDS are its low count rate (500 x-1) and small area (0.04 mm2 for a bare single pixel, 5 mm2 with a polycapillary optic). We are developing a 32x32 pixel array with a total area of 40 mm^2^ and with a total count rate between 105s-1. In this paper, we briefly describe our progress towards a system with an array of microcalorimeter x-ray detectors.
Proceedings Title
Proc., Microscopy and Microanalysis Conf.
Conference Dates
August 5-9, 2001
Conference Location
Long Beach, CA, USA


arrays, EDS, microcalorimeter, x-ray detectors


Nam, S. , Wollman, D. , Newbury, D. , Hilton, G. , Irwin, K. , Rudman, D. , Deiker, S. , Bergren, N. and Martinis, J. (2001), Progress Towards Arrays of Microcalorimeter X-ray Detectors, Proc., Microscopy and Microanalysis Conf., Long Beach, CA, USA (Accessed April 24, 2024)
Created August 31, 2001, Updated October 12, 2021