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Implementation of CMOS Compatible Conductance-based Micro-Gas-Sensor System
Published
Author(s)
Muhammad Afridi, John S. Suehle, Mona E. Zaghloul, Jason E. Tiffany, Richard E. Cavicchi
Abstract
A CMOS compatible micro-gas sensor system was designed and fabricated in a standard CMOS process through MOSIS. This chip was post-processed to create microhotplates using bulk micro-machining techniques. Tin-oxide-sensing films were grown over post-patterned gold sensing electrodes using a low-pressure chemical vapor deposition (CVD) technique. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 OC/mW thermal efficiency. The microhotplate operates at temperatures between 20 OC - 450 OC. Tin-oxide-sensing films were isothermally characterized using different gas molecules and concentrations. This paper describes the fabrication, characterization, and design of interface circuitry of a novel CMOS integrated micro-gas-sensor system.
Proceedings Title
Proc., ECCTD'01
Conference Dates
August 28-31, 2001
Conference Location
Espoo, 1, FI
Conference Title
European Conference on Circuit Theory and Design
Pub Type
Conferences
Keywords
CMOS, MEMS gas sensor, microhotplate, thin films, gas sensor
Citation
Afridi, M.
, Suehle, J.
, Zaghloul, M.
, Tiffany, J.
and Cavicchi, R.
(2001),
Implementation of CMOS Compatible Conductance-based Micro-Gas-Sensor System, Proc., ECCTD'01, Espoo, 1, FI
(Accessed May 7, 2024)