Implementation of CMOS Compatible Conductance-based Micro-Gas-Sensor System
Muhammad Afridi, John S. Suehle, Mona E. Zaghloul, Jason E. Tiffany, Richard E. Cavicchi
A CMOS compatible micro-gas sensor system was designed and fabricated in a standard CMOS process through MOSIS. This chip was post-processed to create microhotplates using bulk micro-machining techniques. Tin-oxide-sensing films were grown over post-patterned gold sensing electrodes using a low-pressure chemical vapor deposition (CVD) technique. The thermal properties of the microhotplates include a one-millisecond thermal time constant and a 10 OC/mW thermal efficiency. The microhotplate operates at temperatures between 20 OC - 450 OC. Tin-oxide-sensing films were isothermally characterized using different gas molecules and concentrations. This paper describes the fabrication, characterization, and design of interface circuitry of a novel CMOS integrated micro-gas-sensor system.
August 28-31, 2001
Espoo, 1, FI
European Conference on Circuit Theory and Design
CMOS, MEMS gas sensor, microhotplate, thin films, gas sensor
, Suehle, J.
, Zaghloul, M.
, Tiffany, J.
and Cavicchi, R.
Implementation of CMOS Compatible Conductance-based Micro-Gas-Sensor System, Proc., ECCTD'01, Espoo, 1, FI
(Accessed December 2, 2023)