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Conferences

Radiometry of Low-Pressure Hg-Ar Discharges

August 1, 2001

Author(s)

Craig J. Sansonetti, Joseph Reader

New fluorescent lamp designs employ Hg-Ar discharges under operating conditions that differ significantly from those found in conventional fluorescent tubes. We...

Problem With Submicrometer-Linewidth Standards and a Proposed Solution

August 1, 2001

Author(s)

James E. Potzick

Traceable linewidth measurements of tiny features on photomasks and wafers present interesting challenges. Usually technical solutions exist for the problems...

Comparison of Edge Detection Methods Using a Prototype Overlay Calibration Artifact

August 1, 2001

Author(s)

Richard M. Silver, Jay S. Jun, Edward A. Kornegay, R Morton

Accurate overlay measurements rely on robust, repeatable, and accurate feature position determination. In our effort to develop traceable we have examined a...

Reference Material 8091: New Scanning Electron Microscope Sharpness Standard

August 1, 2001

Author(s)

Andras Vladar, Michael T. Postek, Nien F. Zhang, Robert D. Larrabee, Samuel N. Jones, Russell E. Hajdaj

All scanning electron microscope-based inspection instruments, whether they are in a laboratory or on the production line, slowly lose their performance and...

Edge Determination for Polycrystalline Silicon Lines on Gate Oxide

August 1, 2001

Author(s)

John S. Villarrubia, Andras Vladar, J R. Lowney, Michael T. Postek

In a scanning electron microscope (SEM) top-down secondary electron image, areas within a few tens of nanometers of the line edges arc characteristically...

Active Monitoring and Control of Electron-Beam-Induced Contaminaition

August 1, 2001

Author(s)

Andras Vladar, Michael T. Postek, R Vane

The vacuum system of all scanning electron microscopes (SEMs), even in the so-called clean instruments, have certain hydrocarbon residues that the vacuum pumps...

Electric Force Microscopy with a Single Carbon Nanotube Tip

August 1, 2001

Author(s)

John A. Dagata, F S. Chien, S Gwo, K Morimoto, T Inoue, J Itoh, H Yokoyama

Carbon nanotube tips offer a significant improvement over standard scanned probe microscope (SPM) tips for electrical characterization of nanodevice structures...

Silicon Single Atom Steps as AFM Height Standards

August 1, 2001

Author(s)

Ronald G. Dixson, Ndubuisi G. Orji, Joseph Fu, V W. Tsai, E. C. Williams, Theodore V. Vorburger, H Edwards, D Cook, P West, R Nyffenegger

Atomic force microscopes (AFMs) are used in the semiconductor industry for a variety of metrology purposes. Step height measurements at the nanometer level and...

Problem with Submicrometer-linewidth Standards and A Possible Solution

August 1, 2001

Author(s)

James E. Potzick

Traceable linewidth measurements of tiny features on photomasks and wafers present interesting challenges. Usually technical solutions exist for the problems...

Publication and Use of Large Data Sets

August 1, 2001

Author(s)

J R. Rumble

Scientific information comes in many sizes, types and quality. Because of diversity of the scientific information being published, different issues will arise...

Modeling Linear and Nonlinear Inductive Effects in Superconductiong Planar Circuits

August 1, 2001

Author(s)

James Booth, Christopher L. Holloway, Edward Kuester

Efficient and Accurate Testing of an EMC Compliance Chamber Using an Ultrawideband Measurement System

August 1, 2001

Author(s)

Robert T. Johnk, David R. Novotny, Claude Weil, Marlene Taylor, T. J. O'Hara

This paper summarizes a joint NIST-Industry measurement effort. The purpose of this effort was to use a NIST-developed ultrawideband measurement system to...

On the Use of Fitting Models for the Time-Domain Analysis of Problems with Frequency-Dependent Parameters

August 1, 2001

Author(s)

Alberto Scarlatti, M. S. Sarto, Christopher L. Holloway

The use of fitting models in the time-domain analysis of electromagnetic problems is of great interest. The aim of this paper is to describe the main features...

Emission and Immunity Standards: Replacing Field-at-a-Distance Measurements with Total-Radiated-Power Measurements

August 1, 2001

Author(s)

Perry F. Wilson, Galen H. Koepke, John M. Ladbury, Christopher L. Holloway

The radiation and reception patterns of devices become more complicated as the measurement frequency is increased. These complicated patterns pose a challenge...

Analyzing Broadband Free-Field, Absorber Measurements

August 1, 2001

Author(s)

David R. Novotny, Robert T. Johnk, Arthur Ondrejka

We present and analyze a method for free-field evaluation of broadband absorber in a non-ideal testing environment. Using broadband, short-impulse TEM horns, a...

Characterization of Thin and Ultrathin Polymer and Resist Films

August 1, 2001

Author(s)

D L. Goldfarb, Q Lin, M Angelopoulos, Christopher Soles, Eric K. Lin, Wen-Li Wu

The need for a better understanding of the physicochemical properties of radiation-sensitive thin polymer coatings for lithographic applications is driven by...

The Art and Science of Lamp Photometry

August 1, 2001

Author(s)

R S. Bergman, Yoshi Ohno

This paper first overviews photometric quantities of lamps - luminous flux, luminous intensity, illuminance, and luminance - and general techniques for...

Active Monitoring and Control of Electron-Beam-Induced Contamination

August 1, 2001

Author(s)

Andras Vladar, Michael T. Postek, R Vane

The vacuum systems of all scanning electron microscopes (SEMs), even in the so-called clean instruments, have certain hydrocarbon residues that the vacuum pumps...

SEM Sentinel-SEM Performance Measurement System

August 1, 2001

Author(s)

Bradley N. Damazo, Andras Vladar, Alice V. Ling, Alkan Donmez, Michael T. Postek, Crossley E. Jayewardene

This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope...

Properties of Cavity-Backed Slot-Ring Antennas at 95 GHZ

August 1, 2001

Author(s)

Shalva Nolen, Todd E. Harvey, Carl D. Reintsema, Erich N. Grossman

Slot-ring antennas with planar backshorts, designed for operation at 95 GHz, have been fabricated and their properties measured. Using optical lithography, we...

Design of an Active MM-Wave Concealed Object Imaging System

August 1, 2001

Author(s)

Nicholas Paulter, Erich N. Grossman, Gerard N. Stenbakken, Bryan C. Waltrip, Shalva Nolen, Carl D. Reintsema

The research and design of an active millimeter-wave concealed object imaging system is described. Several illumination and detection methods were analyzed via...

Concealed Weapons Detection System Using Uncooled, Pulsed, Imaging Arrays of Millimeter-Wave Bolometers

August 1, 2001

Author(s)

Erich N. Grossman, Shalva Nolen, Nicholas Paulter, Carl D. Reintsema

We describe a system for detection of concealed weapons based upon imaging the millimeter-wave reflectance contrast between the weapon and the human body. An...

Experimental Dynamics of Stressed, Strongly Correlated Plasmas, ed. by F. Anderegg, L. Schweikhard, and C.F. Driscoll

July 30, 2001

Author(s)

T B. Mitchell, John Bollinger, Wayne M. Itano, Daniel H. Dubin

Intercomparisons of the Measurement of Force Among National Metrology Institutes

July 29, 2001

Author(s)

Thomas W. Bartel

A description will be given of the ongoing Comite International des Poids et Measures (CIPM) key comparison programs in force. The participation of the National...

Basic Procedures in Force Calibration at NIST

July 29, 2001

Author(s)

Ricky L. Seifarth, Samuel L. Ho

Force calibrations obtainable at the National Institute of Standards and Technology (NIST) continue to focus on extracting the maximum performance from the...

The Policy Machine for Security Policy Management

July 17, 2001

Author(s)

Chung Tong Hu, Deborah A. Frincke, David F. Ferraiolo

Many different access controls policies and models have been developed to suit a variety of goals: these include Role-Based Access Control, One-directional...

A Framework for Performance Evaluation and Optimization of an Emerging Multimedia DS-CDMA Network

July 10, 2001

Author(s)

Vladimir Marbukh, David H. Su

This paper proposes a framework for performance evaluation md optimization of an emerging multimedia, packet Direct-Sequence Code Division Multiple Access (DS...

A History of Testing Heat Insulators at the National Institute of Standards and Technology

July 1, 2001

Author(s)

Robert R. Zarr

The history of testing heat insulators at the National Institute of Standards and Technology (formerly the National Bureau of Standards is nearly as long as the...

Temperature-Dependent Behavior of PbSc_1/2Nb_1/2O₃ From First Principles

July 1, 2001

Author(s)

Eric J. Cockayne, Benjamin P. Burton, L Bellaiche

We study the ferroelectric phase transition in PbSc1/2Nb1/2O3 (PSN) using a first-principles effective Hamiltonian approach. Results for PSN with NaCl-type...

A Genetic Programming System with a Procedural Program Representation

July 1, 2001

Author(s)

John G. Hagedorn, J E. Devaney

We describe the status of a genetic programming system that is based on a procedural program representation. The procedural representation is closely related to...

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