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MEMS Test Structures for Mechanical Characterization of VLSI Thin Films

Published

Author(s)

David L. Herman, Michael Gaitan, Don DeVoe
Proceedings Title
Proc., SEM Conference
Conference Dates
June 4-6, 2001
Conference Location
Portland, OR, US
Conference Title
SEM Conference

Citation

Herman, D. , Gaitan, M. and DeVoe, D. (2001), MEMS Test Structures for Mechanical Characterization of VLSI Thin Films, Proc., SEM Conference, Portland, OR, US (Accessed February 22, 2024)
Created June 5, 2001, Updated October 12, 2021