Herman, D.
, Gaitan, M.
and DeVoe, D.
(2001),
MEMS Test Structures for Mechanical Characterization of VLSI Thin Films, Proc., SEM Conference, Portland, OR, US
(Accessed May 13, 2025)
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MEMS Test Structures for Mechanical Characterization of VLSI Thin Films
Published
Author(s)
, , Don DeVoe
Proceedings Title
Proc., SEM Conference
Conference Dates
June 4-6, 2001
Conference Location
Portland, OR, US
Conference Title
SEM Conference
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created June 5, 2001, Updated October 12, 2021