Herman, D.
, Gaitan, M.
and DeVoe, D.
(2001),
MEMS Test Structures for Mechanical Characterization of VLSI Thin Films, Proc., SEM Conference, Portland, OR, US
(Accessed January 17, 2025)
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MEMS Test Structures for Mechanical Characterization of VLSI Thin Films
Published
Author(s)
, , Don DeVoe
Proceedings Title
Proc., SEM Conference
Conference Dates
June 4-6, 2001
Conference Location
Portland, OR, US
Conference Title
SEM Conference
Pub Type
Conferences
Citation
Issues
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Created June 5, 2001, Updated October 12, 2021