@conference{767491,
  author = {David Herman and Michael Gaitan and Don DeVoe},
  title = {MEMS Test Structures for Mechanical Characterization of VLSI Thin Films},
  year = {2001},
  month = {2001-06-06 00:06:00},
  publisher = {Proc., SEM Conference, Portland, OR, US},
  language = {en},
}