TY  - CONF
AU  - David Herman
AU  - Michael Gaitan
AU  - Don DeVoe
C2  - Proc., SEM Conference, Portland, OR, US
DA  - 2001-06-06 00:06:00
LA  - en
PB  - Proc., SEM Conference, Portland, OR, US
PY  - 2001
TI  - MEMS Test Structures for Mechanical Characterization of VLSI Thin Films
ER  -