Validation of Scanning Probe Moire Technique With the CTE of Gold
Elizabeth S. Drexler, T A. Winningham
Low expansion materials used in electronic devices require a tool that has a commensurate resolution for measuring deformation, such as the atomic force or scanning probe microscope (SPM). The SPM was evaluated for this purpose by conducting experiments analogous to electron-beam moire to measure the coefficient of thermal expansion (CTE) of gold. Moire fringes were generated by the interference of the specimen grating instrumented onto the polished gold surface and the rastering of the cantilever tip of the SPM in contact mode set to detect height. Tests in which gold was thermally loaded were conducted on two types of SPMs, one an open-loop positioning system, the other a closed-loop system. In both cases values calculated for the CTE of gold were in poor agreement with the handbook value of 14.2 x 10-6/ C, and varied widely with a standard deviation nearly twice the magnitude of the reported handbook value.
Proceedings of the Society for Experimental Mechanics Annual Meeting
June 4-6, 2001
Conference of Society for Experimental Mechanics
AFM, atomic force microscope, coefficient of thermal expansion, gold, moire, scanning probe microscope, SPM, strain
and Winningham, T.
Validation of Scanning Probe Moire Technique With the CTE of Gold, Proceedings of the Society for Experimental Mechanics Annual Meeting
(Accessed March 4, 2024)