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PUBLICATIONS

Interferometric Figure Metrology; Enabling In-House Traceability

Published

Author(s)

Christopher J. Evans, Angela Davies, Tony L. Schmitz, R E. Parks

Abstract

The basic goal of the Advanced Optics Metrology program at NIST''s Manufacturing Engineering Laboratory is to help industry ensure that their measurement results of optical figure and wavefront are traceable. This paper underscores the importance of traceability and reviews the facilities and projects dedicated to achieving that object.
Volume
4450
Conference Dates
July 29-31, 2001
Conference Location
San Diego, CA
Conference Title
SPIE Annual Meeting
Pub Type
Conferences

Keywords

figure, interferometer, traceability, uncertainty, wavefront
Dimensional metrology

Citation

Evans, C. , Davies, A. , Schmitz, T. and Parks, R. (2001), Interferometric Figure Metrology; Enabling In-House Traceability, SPIE Annual Meeting, San Diego, CA (Accessed June 8, 2023)

Created June 6, 2001, Updated February 19, 2017