Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer

Published

Author(s)

Christopher W. Meyer, D P. DeWitt, Kenneth G. Kreider, Francis J. Lovas, Benjamin K. Tsai

Abstract

Light-pipe radiation thermometers (LPRTs) are the sensor system of choice in RTP tools. They can be calibrated against blackbodies with an uncertainty (k=1) less than 0.3 C. In an RTP tool, however, account must be made for wafer emissivity and wafer-chamber interreflections, or else temperature measurement uncertainties will be orders of magnitude higher. We have used two complementary approaches for accomplishing this: 1) in situ calibration using high-accuracy wire/thin-film thermocouples calibrated on the International Temperature Scale of 1990 (ITS-90) and 2) developing optical models to estimate the effective emissivity of the wafer eeff when used in the radiation environment of the RTP tool. The temperature measurement uncertainty of LPRTs using either technique is 2.1 C or less.
Proceedings Title
Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics
Volume
No. 550
Conference Dates
June 1, 2000
Conference Title
AIP Conference Proceedings

Keywords

ITS-90, Light Pipe Radiation Thermometers, Rapid Thermal Processing, Thin Film Thermocouples

Citation

Meyer, C. , DeWitt, D. , Kreider, K. , Lovas, F. and Tsai, B. (2001), ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer, Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830687 (Accessed May 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 1, 2001, Updated February 17, 2017