TY  - CONF
AU  - Christopher Meyer
AU  - D DeWitt
AU  - Kenneth Kreider
AU  - Francis Lovas
AU  - Benjamin Tsai
C2  - Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics
DA  - 2001-06-01
LA  - en
M1  - No. 550
PB  - Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics
PY  - 2001
TI  - ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830687
ER  -