@conference{79601,
  author = {Christopher Meyer and D DeWitt and Kenneth Kreider and Francis Lovas and Benjamin Tsai},
  title = {ITS-90 Calibration of Radiation Thermometers for RTP Using Wire/Thin-Film Thermocouples on a Wafer},
  year = {2001},
  number = {No. 550},
  month = {2001-06-01},
  publisher = {Characterization and Metrology for ULSI Technology, International Conference | | | American Institute of Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830687},
  language = {en},
}