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Conferences

Recent Developments in Standards for Measurement Uncertainty and Traceability

May 1, 2003

Author(s)

Steven D. Phillips

This paper examines recent and future work of the B89.7 and ISO 14253 series of standards. Other recent online information on measurement uncertainty and

Implementation of a Reference Measurement System Using CD-AFM

May 1, 2003

Author(s)

Ronald G. Dixson, Theodore V. Vorburger, Angela Guerry, Marylyn H. Bennett, B Bunday

International SEMATECH (ISMT) and the National Institute of Standards and Technology (NIST) are working together to improve the traceability of atomic force

Calibration Strategies for Overlay and Registration Metrology

May 1, 2003

Author(s)

Richard M. Silver, Michael T. Stocker, Ravikiran Attota, M R. Bishop, Jay S. Jun, Egon Marx, M P. Davidson, Robert D. Larrabee

Critical dimensions in current and next generation devices are driving the need for tighter overlay registration tolerances and improved overlay metrology tool

Potentials for High-Pressure/Environmental SEM Microscopy for Photomask Dimensional Metrology

May 1, 2003

Author(s)

Michael T. Postek, Andras Vladar, T Rice, R Knowles

Binary and phase-shifting chromium on quartz optical photomasks have been successfully investigated with high-pressure/environmental scanning electron

Measurement Uncertainty and Traceability Issues in National and International Measurements

May 1, 2003

Author(s)

Steven D. Phillips

This paper discusses some recent laboratory intercomparisons with emphasis on the success of the uncertainty statement to include the reference value. Some

Metrics and Metrology for FPDs

May 1, 2003

Author(s)

Edward F. Kelley

We review various methods for making optical measurements of flat panel displays (FPDs). In particular, the measurements outlined in the VESA FPDM2 will be

Database-Assisted Design and Structural Reliability for Building Codes

May 1, 2003

Author(s)

S M. Diniz, Emil Simiu

We present a database-assisted design (DAD)-compatible probabilistic procedure for estimating (a)wind effects for any return period and (b) wind load factors

The IEEE Standard on Transitions, Pulses, and Related Waveforms, Std-181

May 1, 2003

Author(s)

Nicholas Paulter, Donald R. Larson, Jerome J. Blair

The IEEE has revised the now withdrawn IEEE standards on pulse techniques and definitions. This revision includes adding and deleting definitions, clarifying

Luminance probes for contrast measurements in medical displays

May 1, 2003

Author(s)

Aldo Badano, Scott Pappada, Edward F. Kelley, Michael J. Flynn, Sandrine Martin, Jerzy Kanicki

We report on a comparative study that examines four conic luminance probes in their ability to measure small-spot display contrast. We performed linear scans of

New Method to Enhance Overlay Tool Performance

May 1, 2003

Author(s)

Ravikiran Attota, Richard M. Silver, Michael T. Stocker, Egon Marx, Jay S. Jun, M P. Davidson, Robert D. Larrabee

New methods to enhance and improve algorithm performance and data analysis are being developed at NIST for overlay measurement applications. Both experimental

Techniques to Improve the Performance of TCP in a Mixed Bluetooth and WLAN Environment

May 1, 2003

Author(s)

Nada T. Golmie, O Rebala

A major challenge for the WLAN technology stems from having to share the 2.4 GHz ISM band with other wireless devices such as Bluetooth radios. The main goal of

The ebXML Test Framework and the Challenges of B2B Testing

May 1, 2003

Author(s)

J Durand, Michael J. Kass, P Wenzel

Testing tools for Conformance and Interoperability are emerging as a key technology for enabling and maintaining interoperability between e-Business partners

Manufacturing Interoperability

May 1, 2003

Author(s)

Steven R. Ray, Albert T. Jones

As manufacturing and commerce become ever more global in nature, companies are increasingly dependent upon the efficient and effective exchange of information

Subnanometer Wavelength Metrology of Lithographically Prepared structures: A Comparison of Neutron and X-Ray Scattering

May 1, 2003

Author(s)

D Casa, R Jones, Theodore V. Vorburger, Ndubuisi George Orji, G Barclay, P Bolton, W Wu, E Lin, T Hu

The challenges facing current metrologies based on SEM, AFM, and light scatterometry for technology nodes of 157 nm imaging and beyond suggest that the

Electron Beam Metrology of 193 nm Resists at Ultra Low Voltage

May 1, 2003

Author(s)

N. Sullivan, Ronald G. Dixson, B Bunday, M Mastovich, P Knutruda, P Fabre, R Brandoma

Resist slimming under electron beam exposure introduces significant measurement uncertainty in the metrology of 193 nm resists. Total critical dimension (CD)

Overlay Metrology Simulations: Analytical and Experimental Validations

May 1, 2003

Author(s)

Joel L. Seligson, B Golovanevsky, J M. Poplawski, M E. Adel, Richard M. Silver

We have previously reported on an overlay metrology simulation platform, used for modeling both the effects of overlay metrology tool behavior and the impact of

Updated NIST Photomask Linewidth Standard

May 1, 2003

Author(s)

J Pedulla, James E. Potzick, Michael T. Stocker

NIST is preparing to issue the next generation in its line of binary photomask linewidth standards. Called SRM 2059, it was developed for calibrating

IEEE TC-10: What's It All About?

May 1, 2003

Author(s)

Thomas E. Linnenbrink, W. B. Boyer, Nicholas Paulter, S. J. Tilden

The IEEE TC-10 comprises three working groups that have or are generating standards related to the measurement of signals. One of these groups has recently

Hierarchical Restoration Scheme for Multiple Failures in GMPLS Networks

May 1, 2003

Author(s)

San-Nan K. Lee, C Kim, David W. Griffith

It is expected that GMPLS-based recovery could become a viable option for obtaining faster restoration than layer 3 rerouting. Even though dedicated restoration

PSPICE Analysis of the Scanning Capacitance Microscope Sensor

April 27, 2003

Author(s)

Gyoung H. Buh, Chi Tran, Joseph Kopanski

A detailed analysis of the capacitance sensor from a scanning capacitance microscope (SCM) is presented. PSPICE circuit simulations are compared with

Using A Priori Data for Prediction and Object Recognition in an Autonomous Mobile Vehicle

April 25, 2003

Author(s)

Christopher J. Scrapper Jr, T. Takeuchi, Tommy Chang, Tsai Hong Hong, Michael O. Shneier

A robotic vehicle needs to understand the terrain and features around it if it is to be able to navigate complex environments such as road systems. By taking

A Repository of Sensor Data for Autonomous Driving Research

April 25, 2003

Author(s)

Michael O. Shneier, Tommy Chang, Tsai Hong Hong, Geraldine S. Cheok, Harry A. Scott, Steven Legowik, Alan M. Lytle

We describe a project to collect and disseminate sensor data for autonomous mobility research. Our goals are to provide data of known accuracy and precision to

Moving Object Prediction for Off-road Autonomous Navigation

April 25, 2003

Author(s)

Rajmohan Madhavan, Craig I. Schlenoff

The realization of on- and off-road autonomous navigation of Unmanned Ground Vehicles (UGVs) requires real-time motion planning in the presence of dynamic

Ground Truth and Benchmarks for Performance Evaluation

April 25, 2003

Author(s)

A Takeuchi, Michael O. Shneier, Tsai H. Hong, Christopher J. Scrapper Jr, Geraldine Cheok

Progress in algorithm development and transfer of results to practical applications such as military robotics requires the setup of standard tasks, of standard

Broadband Permittivity and Loss Tangent Measurements Using a Split-Cylinder Resonator

April 24, 2003

Author(s)

Michael D. Janezic, Edward Kuester, James R. Baker-Jarvis

We summarize a theoretical model for the split-cylinder resonator, based on the mode-matching method, for performing nondestructive permittivity and loss

Effects of In-Situ Burning on Coastal Wetlands: Soil Temperatures and Regrowth of Marsh Plant Species

April 6, 2003

Author(s)

Nelson P. Bryner, William D. Walton, I. A. Mendelssohn, Q. Lin, J. V. Mullin

Twenty-one full-scale in-situ burn experiments examined soil temperatures which marsh plants experience during in-situ burning. Two hundred sixty four plant

Overview of Metrology for the Semiconductor Industry at the National Institute of Standards and Technology

April 4, 2003

Author(s)

Stephen Knight

Semiconductor metrology developments at NIST have been conducted since the 1950s, covering a wide range of topics, including investigation of the causes of

A Single Photon On-Demand Source With Decoupled Single and Multiphoton Probabilities: Initial Results

April 1, 2003

Author(s)

Alan L. Migdall, D A. Branning, Stefania Castelletto, M J. Ware

As currently implemented, single photon sources cannot be made to producesingle photons with high probability, while simultaneously suppressingthe probability

The NIST Smart Space and Meeting Room Projects: Signals, Acquisition, Annotation, and Metrics

April 1, 2003

Author(s)

Vincent M. Stanford, John S. Garofolo, O P. Galibert, Martial Michel, Christophe Laprun

Pervasive Computing devices, sensors, and networks, provide infrastructure for context aware smart meeting rooms that sense ongoing human activities and respond

Multichannel Decomposition of Heptyl Radicals

April 1, 2003

Author(s)

Wing Tsang, Iftikhar A. Awan, Jeffrey A. Manion

This paper is concerned with decomposition of heptyl radicals in high temperature combustion environments. Experimental results on the decomposition of n-heptyl

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