Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Conferences

The Common Industry Format: A Way for Vendors and Customers to Talk About Software Usability

June 1, 2003

Author(s)

Jean C. Scholtz, Emile L. Morse, Sharon J. Laskowski, A Wichansky, K Butler, K Sullivan

One way to encourage software developers to integrate usability engineering into their development process is for purchasers to require evidence of product

Structural Characterization of Methylsilsequioxane-Based Porous Low-k Thin Films Using X-Ray Porosimetry

June 1, 2003

Author(s)

Hae-Jeong Lee, Christopher L. Soles, Da-Wei Liu, Barry J. Bauer, Eric K. Lin, Wen-Li Wu

X-ray porosimetry is used to characterize structural characteristics, including pore size distribution, average density, wall density, and porosity, of

Determining Mechanical Properties of 01 Tool Steel from Reverse Computation of Indentation Measurement

June 1, 2003

Author(s)

Li Ma, Samuel R. Low III, Jun-Feng Song, J Zhou

sides obtaining the hardness of materials, indentation test has also been developed as a popular method for investigating mechanical properites. There exist

Tunnel-Coupled Quantum Dots: Atomistic Theory of Quantum Dot Molecules and Arrays

June 1, 2003

Author(s)

Garnett W. Bryant, Javier Aizpurua, W Jaskolski, M Zielinski

An understanding of how dots couple in quantum dot molecules and arrays is needed so that the possibilities for tailored nanooptics in these systems can be

Tunneling Induced Fluorescence as a Probe of Electromagnetic Interaction at Nanometre Proximity

June 1, 2003

Author(s)

G Hoffman, Javier Aizpurua, S P. Apell, R Berndt

Fluorescence induced by the tunneling current of a scanning tunneling microscope is used to investigate the electromagnetic coupling of a metal tip and a metal

Absolute Alignment of the Reference Retroreflectometer at NIST

June 1, 2003

Author(s)

Carl C. Miller

The National Cooperative Highway Research Program (NCHRP Project 05-16) awarded The National Institute of Standards and Technology (NIST) a contract to develop

Obtaining Spectral Data for Colorimetry

June 1, 2003

Author(s)

Yoshihiro Ohno

Simulation analyses have been conducted on the colorimetric errors associated with the data interval, bandpass, and wavelength errors of a spectrometer, using

Uncertainty Analysis of Reflectance Colorimetry

June 1, 2003

Author(s)

E A. Early, Maria E. Nadal

The specification of the color of an object is important, sometimes crucially, to its acceptability for an intended application. When quantitative measurements

Control of Coherent Light and its Broad Applications

June 1, 2003

Author(s)

Jun Ye, R J. Jones, K W. Holman, S M. Foreman, D J. Jones, S T. Cundiff, John L. Hall, T M. Fortier, A Marian

A remarkable synergy has been formed between the technology of precision optical frequency metrology and ultrafast laser science. This has resulted in control

Towards Modeling the Evolution of Product Families

June 1, 2003

Author(s)

Fujun Wang, Steven J. Fenves, Sudarsan Rachuri, Ram D. Sriram

A strategy successfully used by manufacturing companies is to develop product families so as to offer a variety of products with reduced development costs. This

Flexible Modeling and Simulation for Mass Customization Manufacturing

June 1, 2003

Author(s)

Guixiu Qiao, R F. Lu, Frank H. Riddick

Mass Customization Manufacturing (MCM) systems possess special characteristics that make the modeling of such systems extremely difficult. These characteristics

A New Way of Handling Dimensional Meaurement Results for Integrated Circuit Technology

June 1, 2003

Author(s)

Andras Vladar, John S. Villarrubia, Michael T. Postek

The international guidelines for correct expression of measurement results and errors call for a through assessment of the errors, their origin and behavior

Experimental and numerical investigation of fundamental noise on supercontinuum generated in microstructure fiber

June 1, 2003

Author(s)

Kristan L. Corwin, Nathan R. Newbury, Brian Washburn, Scott A. Diddams, J M. Dudley, S. Coen, R Windeler

Supercontinuua generated in microstructure fiber can exhibit amplitude fluctuations of 70%. Experimental and numerical studies of this broadband noise reveal

Experimental And Numerical Evaluation Of GaseousAgents For Suppressing Cup-Burner Flames In Low-Gravity

June 1, 2003

Author(s)

F Takahashi, Gregory T. Linteris, V Katta

Longer duration missions to the moon, to Mars, and on the International Space Station (ISS)increase the likelihood of accidental fires. NASA s fire safety

Probabilistic Description of Wind Effects and Wind Load Factors for Database-Assisted Design

June 1, 2003

Author(s)

S M. Diniz, Emil Simiu

Database-assisted design (DAD) for wind results in structures with reduced material consumption and failure risks, i.e., in improved safety and sustainability

A Model to Predict Hurricanes Induced Losses for Residential Structures

June 1, 2003

Author(s)

J P. Pinelli, C Subramanian, L. Zhang, K Gurley, A Cope, Emil Simiu, S M. Diniz, S Hamid

This paper presents a practical probabilistic model for the projection of annualized damage costs to residential structures due to hurricanes. The estimation of

Proposal for a Practical Procedure for the Expression of Uncertainty in Hardness Measurement

June 1, 2003

Author(s)

G Barbato, A G. Germak, Samuel Low

Hardness measurement is widely used in industrial applications for quality control and acceptance testing of products because it is fast, inexpensive and

Evolutions in Hardness Scales Definition

June 1, 2003

Author(s)

G Barbato, A G. Germak, K -. Herrmann, Samuel Low

A conventional characteristic of hardness measurements in the strong dependency on the official definition of each scale. For this reason, and to assure a good

Sub-Nanometer Wavelength Metrology of Lithographically Prepared Structures: A Comparison of Neutron and X-Ray Scattering

June 1, 2003

Author(s)

Ronald L. Jones, T Hu, Eric K. Lin, Wen-Li Wu, D M. Casa, Ndubuisi George Orji, Theodore V. Vorburger, P J. Bolton, Z Barclay

The challenges facing current metrologies based on SEM, AFM, and light scatterometry for technology nodes of 157 nm imaging and beyond suggest that the

Investigation of BARC-Resist Interfacial Interactions

June 1, 2003

Author(s)

C Devadoss, Yijun Wang, R Puligadda, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, E Jablonski, Daniel A. Fischer, S Sambasivan, Eric K. Lin, Wen-Li Wu

Results are reported from studies of (A) surface versus bulk chemistry of BARC materials as a function of cure temperature, (B) the dependence of the thickness

C₄F₆ 1,3 Hexafluorobutadiene - A New Etching Gas: Studies on Material Compatibility, Behavior in Inductively Coupled Plasma and Etch Processes Performance

June 1, 2003

Author(s)

A Nicoletti, P Srinivasan, M Riva, Eric C. Benck, A N. Goyette, Yicheng Wang, J M. Kim, P Hsieh, A Athayde, Abhay Joshi

Hexafluoro-1,3-butadiene (C 4F 6) is a relatively new etch gas for the manufacturing of semiconductor devices, especially in critical etch processes that need

Design and Performance of Capping Layers for EUV Multilayer Mirrors

June 1, 2003

Author(s)

Sasa Bajt, H N. Chapman, Nhan Nguyen, J Alameda, J C. Robinson, M Malinowski, E Gullikson, Andrew Aquila, Charles Tarrio, Steven Grantham

The reflectance stability of multilayer coatings for extreme ultraviolet lithography (EUVL) in a commercial tool environment is of utmost importance to ensure

Precision Wavelength Metrology with a Fourier Transform Spectrometer

June 1, 2003

Author(s)

D. Veza, Marc L. Salit, John C. Travis, Craig J. Sansonetti

We have investigated the intrinsic accuracy of the optical frequency scale in spectra acquired by a Fourier Transform Spectrometer (FTS). The uncalibrated

Functional Tolerancing of a Gearbox

June 1, 2003

Author(s)

H Wang, Utpal Roy, Sudarsan Rachuri, Ram D. Sriram, Kevin W. Lyons

This paper proposes a scheme for the tolerance specification that uses the features? function information and mating condition attributes in the assembly to

An Open Framework for the Assembly of Micro- and Nano-Scale Artifacts

June 1, 2003

Author(s)

Shaw C. Feng, Yung-Tsun Lee, Kevin W. Lyons

The design and manufacture of miniature devices have been increasing in both research laboratories and industry. The sizes of the devices continue to decrease

A Product Information Modeling Framework For Product Lifecycle Management

June 1, 2003

Author(s)

Steven J. Fenves, Ram D. Sriram, Sudarsan Rachuri, Fujun Wang

We describe a framework for representing products based on the NIST Core Product Model (CPM) and its extensions, the Open Assembly Model (OAM), the Design

Enhancing Virtual Product Representation for Advanced Design Repository Systems

June 1, 2003

Author(s)

Simon Szykman, Matt Bohm, RJ B. Stone

This paper describes the transformation of an existing set of heterogeneous product knowledge into a coherent design re-pository that supports product

An Interface Data Model Supporting Manufacturing Simulation

June 1, 2003

Author(s)

Yung-Tsun Lee, Yan Luo, Charles R. McLean

Simulation technology is underutilized by the manufacturing industry. Standard data interfaces, among simulation modules or between simulation and other

Assembly Simulation in the Design Process in a Distributed Environment

June 1, 2003

Author(s)

Charles R. McLean, Deogratias Kibira, William Reiter, Paul Maropoulos

Simulation technology i s applicable across a distributed enterprise in the pursuit of bringing high quality products to the market in minimum time. The

Energy Distribution of Interface Traps in High-K Gated MOSFETs

June 1, 2003

Author(s)

Jin-Ping Han, Eric M. Vogel, Evgeni Gusev, C. D'Emic, Curt A. Richter, Da-Wei Heh, John S. Suehle

We use variable rise/fall-time charge pumping (CP) to determine the energy distribution of interface trap density (Dit) and capture cross-section of electrons

Was this page helpful?