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Conferences

A Fast, Deterministic Source of Single Cr Atoms

Author(s)
Jabez J. McClelland, Shannon B. Hill
We produce single Cr atoms on demand by feedback control of loading and loss from a magneto-optical trap. We observe single-atom occupation probabilities of

Kolsky Bar With Electrical Pulse Heating of the Sample

Author(s)
Eric P. Whitenton, Michael Kennedy, Matthew A. Davies, Gerald V. Blessing, Brian S. Dutterer, Richard L. Rhorer, Howard W. Yoon, Lyle E. Levine, Richard J. Fields, D Basak, Timothy J. Burns
The accuracy of simulations for modeling of machining processes is often limited due to insufficient knowledge of the material properties during machining

Obtaining Spectral Data for Colorimetry

Author(s)
Yoshihiro Ohno
Simulation analyses have been conducted on the colorimetric errors associated with the data interval, bandpass, and wavelength errors of a spectrometer, using

Investigation of BARC-Resist Interfacial Interactions

Author(s)
C Devadoss, Yijun Wang, R Puligadda, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, E Jablonski, Daniel A. Fischer, S Sambasivan, Eric K. Lin, Wen-Li Wu
Results are reported from studies of (A) surface versus bulk chemistry of BARC materials as a function of cure temperature, (B) the dependence of the thickness

Design and Performance of Capping Layers for EUV Multilayer Mirrors

Author(s)
Sasa Bajt, H N. Chapman, Nhan Nguyen, J Alameda, J C. Robinson, M Malinowski, E Gullikson, Andrew Aquila, Charles Tarrio, Steven Grantham
The reflectance stability of multilayer coatings for extreme ultraviolet lithography (EUVL) in a commercial tool environment is of utmost importance to ensure

Functional Tolerancing of a Gearbox

Author(s)
H Wang, Utpal Roy, Sudarsan Rachuri, Ram D. Sriram, Kevin W. Lyons
This paper proposes a scheme for the tolerance specification that uses the features? function information and mating condition attributes in the assembly to
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