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Kristine A. Bertness, Todd E. Harvey, Albert J. Paul, Larry Robins, Gregory C. Turk, Therese A. Butler, Marc L. Salit
We have applied an analytical chemistry method, inductively coupled plasma optical-emission spectroscopy (ICP-OES), to increase the accuracy of composition...
Kevin K. Jurrens, Johannes A. Soons, Robert W. Ivester
This paper presents an overview of collaborative research activities conducted by staff of the Manufacturing Engineering Laboratory at the National Institute of...
The National Institute of Standards and Technology metrology development for the semiconductor industry and its supporting infrastructure is a broad set of...
Brian Washburn, Jeffrey W. Nicholson, Scott Diddams, M. Yan, C. G. Jorgensen, Nathan R. Newbury
A phase-locked, frequency comb in the near-infrared is presented. Self-referencing detection and stabilization of the carrier-envelope-offset frequency is...
Christopher C. White, Jonathan W. Martin, S F. Weber, L Shultz
Standard test methods, such as ASTM C719, evaluate sealant performance though threshold test measurements. This method and its derivatives do not offer reliable...
The utility of flame size for the assessment of the heat release rate of burning polymers has been studied. Six polymers were tested in the NIST cone...
The unsteady suppression process of a laminar methane-air co-flow diffusion flame formed on a cup burner has been studied experimentally and numerically in...
Geraldine S. Cheok, William C. Stone, Christoph J. Witzgall
The use and scope of LADAR applications continues to expand as the technology matures. This growth is reflected in NIST's experience with research into the...
Property databases are widely used for the design and analysis of refrigeration systems. Version 7 of the NIST REFPROP Reference Fluid Thermodynamic and...
This paper describes an immersive virtual reality system for steel structures. The system integrates standard models and formats for representing structural...
X-Ray Photoelectron Spectroscopy (XPS) is being used to an increasing extent for the characterization of new gate-oxide materials, particularly for the...
John G. Gillen, Scott A. Wight, P Chi, Albert J. Fahey, Jennifer R. Verkouteren, Eric S. Windsor, D. B. Fenner
We are evaluating the use of bevel depth profiling Secondary Ion Mass Spectrometry (SIMS) for the characterization of layered semiconductor materials. In this...
Ronald L. Jones, T J. Hu, Vivek M. Prabhu, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, M Angelopoulos
The push to mass production of patterns with sub-100 nm dimensions will require nanometer level control of feature size, including line edge roughness (LER)...
Ndubuisi G. Orji, Jayaraman Raja, Son H. Bui, Theodore V. Vorburger
One of the most important aspects of step height evaluation are the analysis algorithms used. There algorithms assume that the profiles and images being...
Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization...
Ryna B. Marinenko, J T. Armstrong, Shirley Turner, Eric B. Steel, F A. Stevie
Bulk SiGe wafers cut from single-crystal boules were evaluated with the electron probe microanalyzer (EPMA) for micro- and macroheterogeneity for use as primary...
Kathryn L. Beers, J Cabral, H J. Walls, Alamgir Karim, Eric J. Amis, C Harrison
Rapid prototyping of microfluidic handling devices has gained in popularity due to the ability to quickly test and modify new design features several times in...
ABSTRACT A novel cable-based metrology system is presented wherein six cables are connected in parallel from ground-mounted string pots to the moving object of...
The 2003 NIST Language Recognition Evaluation was very similar to the last such NIST evaluation in 1996. It was intended to establish a new baseline of current...
We participated in field trials of a semi-autonomous vehicle. This gave us an opportunity to collect data on operator interventions. In this paper we present an...
Ronald L. Jones, T J. Hu, Eric K. Lin, Wen-Li Wu, D M. Casa, G G. Barclay
The need for sub-nanometer precision metrology of dense patterns for future technology nodes challenges current methods based on light scatterometry, scanning...
R C. Hedden, V. J. Lee, Barry J. Bauer, Christopher L. Soles, Wen-Li Wu, Eric K. Lin
The principle of small-angle neutron scattering (SANS) contrast variation is applied to characterization of nanoporous low-k thin films. Using a vapor...
T Hu, Ronald L. Jones, Wen-Li Wu, Christopher L. Soles, Eric K. Lin, M Arpan, D M. Casa
As the semiconductor industry moves to next-generation lithographies, evaluation of the patterns is more stringent. We demonstrate the capability of small angel...
E Jablonski, M Angelopoulos, H Ito, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, S Sambasivan, Daniel A. Fischer, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, K Temple
Near edge x-ray absorption fine structure (NEXAFS) spectroscopy was used to quantify the surface composition profile (top 1 nm to 6 nm) of model chemically...
For calibrations of spectral irradiance standards, a high-temperature blackbody (HTBB) is used as a source of spectral radiance or irradiance as derived from...
David W. Allen, Robert D. Saunders, Bettye C. Johnson, Charles E. Gibson, Howard W. Yoon
The International Temperature Scale of 1990 (ITS-90), for temperatures above the freezing temperature of silver, is defined with pyrometers which rely upon...
Lightpipe radiation thermometers (LPRTs) are the sensor of choice for temperature measurements in Rapid Thermal Processing (RTP) applications. At the National...
Dean C. Ripple, Dana R. Defibaugh, Michael R. Moldover, Gregory F. Strouse
The NIST Primary Acoustic Thermometer will measure the difference between the International TemperatureScale of 1990 and the Kelvin Thermodynamic Scale...