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Conferences

The Refprop Database for the Thermophysical Properties of Refrigerants

September 14, 2003

Author(s)

Mark O. McLinden, Eric W. Lemmon, Marcia L. Huber

Property databases are widely used for the design and analysis of refrigeration systems. Version 7 of the NIST REFPROP Reference Fluid Thermodynamic and...

Quantitative infrared spectra of vapor phase chemical agents

September 8, 2003

Author(s)

S W. Sharpe, T J. Johnson, Pamela M. Chu, J Kleimeyer, Randy Rowland

Immersive Virtual Reality for Steel Structures

September 1, 2003

Author(s)

Robert R. Lipman

This paper describes an immersive virtual reality system for steel structures. The system integrates standard models and formats for representing structural...

Measurement of Gate-Oxide Film Thickness by X-ray Photoelectron Spectroscopy

September 1, 2003

Author(s)

Cedric J. Powell, Aleksander Jablonski

X-Ray Photoelectron Spectroscopy (XPS) is being used to an increasing extent for the characterization of new gate-oxide materials, particularly for the...

Bevel Depth Profiling SIMS for Analysis of Layer Structures

September 1, 2003

Author(s)

John G. Gillen, Scott A. Wight, P Chi, Albert J. Fahey, Jennifer R. Verkouteren, Eric S. Windsor, D. B. Fenner

We are evaluating the use of bevel depth profiling Secondary Ion Mass Spectrometry (SIMS) for the characterization of layered semiconductor materials. In this...

Form of Deprotection in Chemically Amplified Resists

September 1, 2003

Author(s)

Ronald L. Jones, T J. Hu, Vivek M. Prabhu, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, M Angelopoulos

The push to mass production of patterns with sub-100 nm dimensions will require nanometer level control of feature size, including line edge roughness (LER)...

Influence of analysis Algorithms on the Value of Distorted Step Height Data

September 1, 2003

Author(s)

Ndubuisi G. Orji, Jayaraman Raja, Son H. Bui, Theodore V. Vorburger

One of the most important aspects of step height evaluation are the analysis algorithms used. There algorithms assume that the profiles and images being...

A Four-Zone Furnace for Realization of Silver and Gold Freezing Points

September 1, 2003

Author(s)

Dean C. Ripple, K Garrity, Christopher W. Meyer

Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization...

Characterization of SiGe Bulk Compositional Standards with Electron Probe Microanalysis

September 1, 2003

Author(s)

Ryna B. Marinenko, J T. Armstrong, Shirley Turner, Eric B. Steel, F A. Stevie

Bulk SiGe wafers cut from single-crystal boules were evaluated with the electron probe microanalyzer (EPMA) for micro- and macroheterogeneity for use as primary...

High-Throughput Milli-Fluidic Platform for Polymer Formulations

September 1, 2003

Author(s)

Kathryn L. Beers, J Cabral, H J. Walls, Alamgir Karim, Eric J. Amis, C Harrison

Rapid prototyping of microfluidic handling devices has gained in popularity due to the ability to quickly test and modify new design features several times in...

Calibration of a Spectral Responsivity Transfer Standard

September 1, 2003

Author(s)

George P. Eppeldauer, Leonard M. Hanssen

Cable-Based Metrology System for Sculpting Assistance

September 1, 2003

Author(s)

R L. Williams, James S. Albus, Roger V. Bostelman

ABSTRACT A novel cable-based metrology system is presented wherein six cables are connected in parallel from ground-mounted string pots to the moving object of...

NIST 2003 Language Recognition Evaluation

September 1, 2003

Author(s)

Alvin F. Martin, Mark A. Przybocki

The 2003 NIST Language Recognition Evaluation was very similar to the last such NIST evaluation in 1996. It was intended to establish a new baseline of current...

Evaluation of Operator Interventions in Autonomous Off-Road Driving

September 1, 2003

Author(s)

Jean C. Scholtz, Brian Antonishek, J D. Young

We participated in field trials of a semi-autonomous vehicle. This gave us an opportunity to collect data on operator interventions. In this paper we present an...

3-Dimensional Lineshape Metrology Using Small Angle X-ray Scattering

September 1, 2003

Author(s)

Ronald L. Jones, T J. Hu, Eric K. Lin, Wen-Li Wu, D M. Casa, G G. Barclay

The need for sub-nanometer precision metrology of dense patterns for future technology nodes challenges current methods based on light scatterometry, scanning...

Measurement of Pore Size and Matrix Characteristics in Low-Κ Dielectrics by Neutron Contrast Variation

September 1, 2003

Author(s)

R C. Hedden, V. J. Lee, Barry J. Bauer, Christopher L. Soles, Wen-Li Wu, Eric K. Lin

The principle of small-angle neutron scattering (SANS) contrast variation is applied to characterization of nanoporous low-k thin films. Using a vapor...

Fast Evaluation of Next-Generation Lithographical Patterns by Small Angle X-Ray Scattering

September 1, 2003

Author(s)

T Hu, Ronald L. Jones, Wen-Li Wu, Christopher L. Soles, Eric K. Lin, M Arpan, D M. Casa

As the semiconductor industry moves to next-generation lithographies, evaluation of the patterns is more stringent. We demonstrate the capability of small angel...

NEXAFS Measurements of the Surface Chemistry of Chemically Amplified Photoresists

September 1, 2003

Author(s)

E Jablonski, M Angelopoulos, H Ito, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, S Sambasivan, Daniel A. Fischer, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, K Temple

Near edge x-ray absorption fine structure (NEXAFS) spectroscopy was used to quantify the surface composition profile (top 1 nm to 6 nm) of model chemically...

Spectral Radiance Comparisons of Two Blackbodies with Temperatures Determined Using Absolute Detectors and ITS-90 Techniques

September 1, 2003

Author(s)

Howard W. Yoon, Charles E. Gibson, J L. Gardner

For calibrations of spectral irradiance standards, a high-temperature blackbody (HTBB) is used as a source of spectral radiance or irradiance as derived from...

The Development and Characterization of an Absolute Pyrometer Calibrated for Radiance Responsivity

September 1, 2003

Author(s)

David W. Allen, Robert D. Saunders, Bettye C. Johnson, Charles E. Gibson, Howard W. Yoon

The International Temperature Scale of 1990 (ITS-90), for temperatures above the freezing temperature of silver, is defined with pyrometers which rely upon...

Characterization and Calibration of Lightpipe Radiation Thermometers for Use in Rapid Thermal Processing

September 1, 2003

Author(s)

Benjamin K. Tsai, D P. DeWitt

Lightpipe radiation thermometers (LPRTs) are the sensor of choice for temperature measurements in Rapid Thermal Processing (RTP) applications. At the National...

Techniques for Primary Acoustic Thermometry to 800 K

September 1, 2003

Author(s)

Dean C. Ripple, Dana R. Defibaugh, Michael R. Moldover, Gregory F. Strouse

The NIST Primary Acoustic Thermometer will measure the difference between the International TemperatureScale of 1990 and the Kelvin Thermodynamic Scale...

Monitoring Sheath Voltages and Ion Energies in High-Density Plasmas Using Noninvasive Radio-Frequency Current and Voltage Measurements

September 1, 2003

Author(s)

Mark A. Sobolewski

To obtain optimal results from plasma processing, the energy of ions incident on substrate wafers must be carefully controlled. Such control has been difficult...

In Situ Optical Diagnostics of Silicon Chemical Vapor Deposition Gas-Phase Processes

September 1, 2003

Author(s)

James E. Maslar, Wilbur S. Hurst

During silicon thermal chemical vapor deposition, reactions occurring in the gas phase above the wafer surface can strongly influence the deposited film quality...

Progress in Primary Acoustic Thermometry at NIST: 273 K to 505 K

September 1, 2003

Author(s)

Gregory F. Strouse, Dana R. Defibaugh, Michael R. Moldover, Dean C. Ripple

The NIST Acoustic Thermometer determines the thermodynamic temperature by measuring the speed of sound of argon in a spherical cavity. We obtained the...

Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools

September 1, 2003

Author(s)

Kenneth G. Kreider, D H. Chen, D P. DeWitt, William A. Kimes, Benjamin K. Tsai

curate temperature measurements are critical in rapid thermal processing (RTP) of silicon wafers for thermal oxidation and dopant anneals. Many RTP tools use...

Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools

September 1, 2003

Author(s)

Kenneth G. Kreider, D H. Chen, D P. DeWitt, William A. Kimes, Benjamin K. Tsai

Lightpipe radiation thermometers (LPRTs) are the preferred temperature monitoring sensor in most rapid thermal processing (RTP) tools for semiconductor...

Determination of Factors Affecting HRTEM Gate Dielectric Thickness Measurement Uncertainty

September 1, 2003

Author(s)

J H. Scott

Because high-resolution transmission electron microscopy (HRTEM) relies on a complex contrast mechanism to produce images of gate dielectric films in cross...

An Open Standard for Chemical Structure Representation: The IUPAC Chemical Identifier

September 1, 2003

Author(s)

Stephen E. Stein, Stephen R. Heller, Dmitrii V. Tchekhovskoi

IUPAC has long been involved in the development of systematic and standard procedures for naming chemical substances on the basis of their structure. The...

Evaluation of One- and Two-Sided Geometric Fitting Algorithms in Industrial Software

September 1, 2003

Author(s)

Craig M. Shakarji

Recent work in testing and comparing maximum-inscribed, minimum-circumscribed, and minimum-zone (Chebyshev) fitting algorithms indicates that serious problems...

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