Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

3-Dimensional Lineshape Metrology Using Small Angle X-ray Scattering

Published

Author(s)

Ronald L. Jones, T J. Hu, Eric K. Lin, Wen-Li Wu, D M. Casa, G G. Barclay

Abstract

The need for sub-nanometer precision metrology of dense patterns for future technology nodes challenges current methods based on light scatterometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). We provide results of initial tests of a measurement technique based on Small Angle X-ray Scattering (SAXS) capable of rapid measurements of test samples produced using conventional test masks without significant sample preparation. The sub-Angstrom wavelength provides nanometer level resolution, with the possibility of increased precision after further refinement of the technique. SAXS results are shown for a test photoresist grating at a variety of angles, demonstrating an ability to extract information on 3-dimensional pattern shape.
Proceedings Title
Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterizeion and Metrology for ULSI Technology | AIP
Volume
683
Conference Dates
March 24-28, 2003
Conference Title
AIP Conference Proceedings

Keywords

nanostructure metrology, pattern characterization, photoresists, samll angle X-ray scattering

Citation

Jones, R. , Hu, T. , Lin, E. , Wu, W. , Casa, D. and Barclay, G. (2003), 3-Dimensional Lineshape Metrology Using Small Angle X-ray Scattering, Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterizeion and Metrology for ULSI Technology | AIP, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852165 (Accessed June 10, 2023)
Created September 1, 2003, Updated February 17, 2017