@conference{167171,
  author = {Ronald Jones and T Hu and Eric Lin and Wen-Li Wu and D Casa and G Barclay},
  title = {3-Dimensional Lineshape Metrology Using Small Angle X-ray Scattering},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterizeion and Metrology for ULSI Technology | AIP},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852165},
  language = {en},
}