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Influence of analysis Algorithms on the Value of Distorted Step Height Data

Published

Author(s)

Ndubuisi G. Orji, Jayaraman Raja, Son H. Bui, Theodore V. Vorburger

Abstract

One of the most important aspects of step height evaluation are the analysis algorithms used. There algorithms assume that the profiles and images being analyzed are ideal, but real step profiles are not ideal and the analysis algorithms can influence the results obtained. We explore some of the variations in results obtained when using three of the most common step height algorithms. Ways to reduced variability are outlined and disucssed.
Proceedings Title
Proceedings of Ninth International Conference on Metrology and Properties of Engineering Surfaces
Conference Dates
September 10-11, 2003
Conference Location
Halmstad, SW
Conference Title
Ninth International Conference on Metrology and Properties of Engineering Surfaces

Keywords

algorithms, profile distortion, step height

Citation

Orji, N. , Raja, J. , Bui, S. and Vorburger, T. (2003), Influence of analysis Algorithms on the Value of Distorted Step Height Data, Proceedings of Ninth International Conference on Metrology and Properties of Engineering Surfaces, Halmstad, SW (Accessed April 15, 2024)
Created September 1, 2003, Updated February 19, 2017