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Conferences

Immersive Virtual Reality for Steel Structures

Author(s)
Robert R. Lipman
This paper describes an immersive virtual reality system for steel structures. The system integrates standard models and formats for representing structural

Bevel Depth Profiling SIMS for Analysis of Layer Structures

Author(s)
John G. Gillen, Scott A. Wight, P Chi, Albert J. Fahey, Jennifer R. Verkouteren, Eric S. Windsor, D. B. Fenner
We are evaluating the use of bevel depth profiling Secondary Ion Mass Spectrometry (SIMS) for the characterization of layered semiconductor materials. In this

Form of Deprotection in Chemically Amplified Resists

Author(s)
Ronald L. Jones, T J. Hu, Vivek M. Prabhu, Christopher L. Soles, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, M Angelopoulos
The push to mass production of patterns with sub-100 nm dimensions will require nanometer level control of feature size, including line edge roughness (LER)

High-Throughput Milli-Fluidic Platform for Polymer Formulations

Author(s)
Kathryn L. Beers, J Cabral, H J. Walls, Alamgir Karim, Eric J. Amis, C Harrison
Rapid prototyping of microfluidic handling devices has gained in popularity due to the ability to quickly test and modify new design features several times in

Cable-Based Metrology System for Sculpting Assistance

Author(s)
R L. Williams, James S. Albus, Roger V. Bostelman
ABSTRACT A novel cable-based metrology system is presented wherein six cables are connected in parallel from ground-mounted string pots to the moving object of

NIST 2003 Language Recognition Evaluation

Author(s)
Alvin F. Martin, Mark A. Przybocki
The 2003 NIST Language Recognition Evaluation was very similar to the last such NIST evaluation in 1996. It was intended to establish a new baseline of current

NEXAFS Measurements of the Surface Chemistry of Chemically Amplified Photoresists

Author(s)
E Jablonski, M Angelopoulos, H Ito, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, S Sambasivan, Daniel A. Fischer, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, K Temple
Near edge x-ray absorption fine structure (NEXAFS) spectroscopy was used to quantify the surface composition profile (top 1 nm to 6 nm) of model chemically

Techniques for Primary Acoustic Thermometry to 800 K

Author(s)
Dean C. Ripple, Dana R. Defibaugh, Michael R. Moldover, Gregory F. Strouse
The NIST Primary Acoustic Thermometer will measure the difference between the International TemperatureScale of 1990 and the Kelvin Thermodynamic Scale
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