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Conferences

NEXAFS Measurements of the Surface Chemistry of Chemically Amplified Photoresists

Author(s)
E Jablonski, M Angelopoulos, H Ito, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, S Sambasivan, Daniel A. Fischer, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, K Temple
Near edge x-ray absorption fine structure (NEXAFS) spectroscopy was used to quantify the surface composition profile (top 1 nm to 6 nm) of model chemically

Immersive Virtual Reality for Steel Structures

Author(s)
Robert R. Lipman
This paper describes an immersive virtual reality system for steel structures. The system integrates standard models and formats for representing structural

Bevel Depth Profiling SIMS for Analysis of Layer Structures

Author(s)
John G. Gillen, Scott A. Wight, P Chi, Albert J. Fahey, Jennifer R. Verkouteren, Eric S. Windsor, D. B. Fenner
We are evaluating the use of bevel depth profiling Secondary Ion Mass Spectrometry (SIMS) for the characterization of layered semiconductor materials. In this

Temperature Metrology and Its Impact on Industry

Author(s)
Hratch G. Semerjian, Ellyn S. Beary
Temperature measurement represents one of the most frequently and broadly used measurements, with a majority of products manufactured having temperature

Temperature and Flux Scales for Heat-Flux Sensor Calibration

Author(s)
A V. Murthy, D P. DeWitt, Benjamin K. Tsai, Gerald T. Fraser, Robert D. Saunders
Methodologies for calibrating heat-flux sensors designed for direct measurement of heat-transfer at a surface are presented. These sensors, extensively used in

A Bridge for Scaling to Higher Resistance from the QHR

Author(s)
Randolph Elmquist, Dean G. Jarrett
A two-terminal bridge for resistance scaling directly from the quantum Hall resistance (QHR) to higher-resistance values now provides a secondary starting point
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