Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Determination of Pore-Size Distributions in Low-Κ Dielectric Films by Transmission Electron Microscopy

Published

Author(s)

B J. Foran, B Kastenmeier, David S. Bright

Abstract

This paper discusses methods of characterizing pore size distributions in low-k films by transmission electron microscopy (TEM), comparing both conventional TEM and high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM). Methods of sample preparation were tailored to protect pore structure during cross-sectional thinning allowing techniques similar to conventional mechanical polishing and low-angle ion milling. Knowledge of TEM sample thickness allows quantification of pore density distributions. TEM sample thickness and quantitative image analysis methods are discussed.
Proceedings Title
Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP
Volume
683
Conference Dates
March 24-28, 2003
Conference Location
Austin, TX, US
Conference Title
AIP Conference Proceedings

Keywords

dielectric films, HAADF-STEM, image processing, pore size distribution porous low-k, scanning transmission electron microscop, transmission electron microscopy

Citation

Foran, B. , Kastenmeier, B. and Bright, D. (2003), Determination of Pore-Size Distributions in Low-Κ Dielectric Films by Transmission Electron Microscopy, Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX, US (Accessed February 29, 2024)
Created August 31, 2003, Updated October 12, 2021