@conference{794391,
  author = {B Foran and B Kastenmeier and David Bright},
  title = {Determination of Pore-Size Distributions in Low-Κ Dielectric Films by Transmission Electron Microscopy},
  year = {2003},
  number = {683},
  month = {2003-09-01 00:09:00},
  publisher = {Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX, US},
  language = {en},
}