TY  - CONF
AU  - B Foran
AU  - B Kastenmeier
AU  - David Bright
C2  - Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX, US
DA  - 2003-09-01 00:09:00
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology | AIP, Austin, TX, US
PY  - 2003
TI  - Determination of Pore-Size Distributions in Low-Κ Dielectric Films by Transmission Electron Microscopy
ER  -