Characterization and Calibration of Lightpipe Radiation Thermometers for Use in Rapid Thermal Processing

Published

September 1, 2003

Author(s)

Benjamin K. Tsai, D P. DeWitt

Abstract

Lightpipe radiation thermometers (LPRTs) are the sensor of choice for temperature measurements in Rapid Thermal Processing (RTP) applications. At the National Institute of Standards and Technology (NIST), we have developed protocols for calibrating and characterizing LPRTs for use in RTP and other applications. In this paper, the LPRTs and the sodium heat pipe blackbody (Na-HPBB) used in the calibration process at NIST will be introduced. The calibration and characterization methods (spatial response, spectral response, temporal response, and optical inspection) of the LPRTs will be described also. Finally, a discussion of the application of LPRTs in an environment outside of the calibration laboratory, along with a list of recommendations for proper use of LPRTs, will be presented.

Proceedings Title

Temperature, International Symposium | Eighth | Temperature: Its Measurement and Control in Science and Industry | AIP

Volume

684

Issue

Pt. 1

Conference Dates

October 21-24, 2002

Conference Title

AIP Conference Proceedings

Pub Type

Conferences

Keywords

blackbody, calibration, characterization, lightpipe fradiation thermometer, radiometeric temperature, rapid thermal processing, sodium heat pipe

Citation

Tsai, B. and DeWitt, D. (2003), Characterization and Calibration of Lightpipe Radiation Thermometers for Use in Rapid Thermal Processing, Temperature, International Symposium | Eighth | Temperature: Its Measurement and Control in Science and Industry | AIP (Accessed May 7, 2024)