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Waste Management in Semiconductor Facilities
Understanding Waste Streams
Semiconductor fabrication facilities generate both hazardous and nonhazardous solid waste. Solid waste streams include various forms of material and can include not just solid waste but also liquids, semi-solids, and contained gases. Hazardous waste is a subset of solid waste that may pose substantial threats to human health or the environment due to its characteristics, or that may be listed under the Resource Conservation and Recovery Act (RCRA).
For more information on RCRA see: Resource Conservation and Recovery Act (RCRA) Laws and Regulations | US EPA
Regulatory Framework
RCRA gives EPA the authority to control hazardous waste from "cradle-to-grave." This includes the generation, transportation, treatment, storage and disposal of hazardous waste. To achieve this, EPA develops regulations, guidance and policies that ensure the safe management and cleanup of solid and hazardous waste, and programs that encourage source reduction and beneficial reuse.
RCRA established a national framework for hazardous waste management under Subtitle C of the Act and nonhazardous waste management under Subtitle D of the Act.
Hazardous Waste Management
Hazardous waste is waste that can be harmful to humans or the environment. Hazardous waste is generated from many sources, including industrial manufacturing processes, and may come in many forms, including liquids, solids, gases, and sludges. Hazardous waste is either specifically listed as hazardous by EPA or a state, or exhibits one or more of the following characteristics:
- Ignitability
- Corrosivity
- Reactivity
- Toxicity
RCRA Subtitle C: Establishes a system for controlling hazardous waste from its generation to disposal (“cradle to grave”). This includes identification of hazardous wastes, generator standards, and requirements for storage, transport, treatment and disposal.
Hazardous Waste Generators: Generators are classified into three categories based on the amount of waste produced monthly, which then in turns dictates:
how long the waste can accumulate;
how the waste must be managed when on site, transported, and disposed;
training requirements for those that handle the waste;
emergency preparedness and planning; and
recordkeeping and reporting requirements.
State Programs: RCRA also authorizes states to enforce more stringent requirements for hazardous waste generators than the federal standards.
For more information on Hazardous Waste see: Hazardous Waste | US EPA
Non-Hazardous Waste Management
Non-hazardous waste can be generated during the production of goods, and can include:
- Industrial materials
- Ash, sludges, antifreeze, grinding dusts, and liquids contaminated with non-hazardous chemicals
- Plastic packaging, clean glass and plastic, paper and cardboard, and office products
- Electronic waste
- Aluminum, copper, gold, plastic, and glass parts
RCRA Subtitle D: Regulates the disposal of non-hazardous solid waste, setting criteria for landfills, and encouraging state-level management plans.
For more information on landfills see: Basic Information about Landfills | US EPA
Waste Treatment and Disposal Practices
Semiconductor facilities use various methods to manage solid waste, including reuse, recycle, recovery, storage, treatment, and disposal. Generally, solid waste is transported offsite for management by waste service providers. Liquid wastes will undergo treatment to remove solids before disposal, and specific systems are in place to segregate and manage solvents and metals.
Many semiconductor companies have adopted circular economy initiatives to increase recycling and reduce hazardous waste generation. Efficient waste management practices in semiconductor facilities not only comply with stringent regulatory requirements but also support their own corporate sustainability goals. The Environmental Division evaluates the waste management practices of CHIPS applicants during the review process and mandates reporting of any notices of violation and/or enforcement actions. Once awards are made, award recipients are required to make public their progress toward their waste reduction goals.
Ensuring Compliance
The Environmental Division works with CHIPS projects to facilitate compliance with RCRA regulations and to encourage implementation of effective waste/hazardous waste control measures. Through Best Management Practices (BMPs) and proactive engagement with industry, the Environmental Division aims to minimize the industry’s environmental impact while it continues to innovate and produce essential technologies.
For more information on water quality regulations and the semiconductor industry visit the EPA’s Resource Conservation and Recovery Act (RCRA) Laws and Regulations | US EPA
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