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Search Publications by: Ronald L. Jones (Fed)

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Displaying 51 - 75 of 149

The Direct Patterning of Nanoporous Interlayer Dielectric Insulator Films by Nanoimprint Lithography

October 2, 2007
Author(s)
Hyun Wook Ro, Ronald L. Jones, H Peng, Daniel R. Hines, Hae-Jeong Lee, Eric K. Lin, Alamgir Karim, Do Y. Yoon, D Gidley, Christopher L. Soles
Directly patterning dielectric insulator materials via nanoimprint lithography has the potential to simplify fabrication processes and significantly reduce the manufacturing costs for semiconductor devices. However, the prospect of mechanically forming

Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography

May 24, 2007
Author(s)
Yifu Ding, Hyun Wook Ro, Jack F. Douglas, Ronald L. Jones, Daniel R. Hines, Alamgir Karim, Christopher L. Soles
We examine the influence of viscoelastic effects on the stability of nanoimprinted polymer films. The decay of features for polymers below the critical entanglement molecular mass at elevated temperatures is determined by simple surface tension and the

Environment-Controlled Spin Coating to Orient Microdomains in Thin Block Copolymer Films

March 20, 2007
Author(s)
Sangcheol Kim, R M. Briber, Alamgir Karim, Ronald L. Jones, H C. Kim
We demonstrate a simple and fast methodology to control the orientation of cylindrical microdomains in thin block copolymer films using environment-controlled spin coating. During spinning, the preferential affinity of vapor atmosphere successfully directs

Field-Induced Formation of Linear, Mesoscopic Polymer Chains From Ferromagnetic Nanoparticles

February 2, 2007
Author(s)
Jason Benkoski, Steven Bowles, Bryan Korth, Ronald L. Jones, Jack F. Douglas, Alamgir Karim, Jeffrey Pyun
Polymer-coated ferromagnetic colloids are first assembled with an applied magnetic field and then permanently fixed into one-dimensional mesostructures using a novel liquid-liquid interfacial system known as Fossilized Liquid Assembly. Using polystyrene

Line Edge Roughness Characterization of Sub-50nm Structures Using CD-SAXS: Round-Robin Benchmark Results

January 1, 2007
Author(s)
Chengqing C. Wang, J C. Roberts, Robert Bristol, B Bunday, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, John S. Villarrubia, Kwang-Woo Choi, James S. Clarke, Bryan J. Rice, Michael Leeson
he need to characterize line edge and line width roughness in patterns with sub-50 nm critical dimension challenges existing platforms based on electron microscopy and optical scatterometry. The development of x-ray based metrology platforms provides a

Photocurable Oil/Water Interfaces as a Universal Platform for 2-D Self-Assembly

December 14, 2006
Author(s)
Jason Benkoski, Ronald L. Jones, Jack F. Douglas, Alamgir Karim
We present a novel platform for the creation of 2-D assemblies from nanoscale building blocks. The system consists of an oil/water interface in which the oil phase can be flash-cured upon UV exposure. The photopolymerizable material, 1,12-dodecanediol

Evidence for Internal Stresses Induced by Nanoimprint Lithography

November 30, 2006
Author(s)
Hyun Wook Ro, Yifu Ding, Hae-Jeong Lee, Daniel R. Hines, Ronald L. Jones, Eric K. Lin, Alamgir Karim, Wen-Li Wu, Christopher L. Soles
The thermal embossing form of nanoimprint lithography is used to pattern arrays of nanostructures into several different polymer films. The shape of the imprinted patterns is characterized with nm precision using both X-ray scattering and reflectivity

Advanced Metrology Needs for Nanoelectronics Lithography

October 1, 2006
Author(s)
Stephen Knight, Ronald Dixon, Ronald L. Jones, Eric Lin, Ndubuisi G. Orji, Richard M. Silver, Andras Vladar, Wen-li Wu
The semiconductor industry has exploited productivity improvements through aggressive feature size reduction for over four decades. While enormous effort has been expended in developing the optical lithography tools to print ever finer features

Real Time Shape Evolution of Nanoimprinted Polymer Structures During Thermal Annealing

July 18, 2006
Author(s)
Ronald L. Jones, T Hu, Christopher L. Soles, Eric K. Lin, R M. Reano, Stella W. Pang, D M. Casa
The real time shape of nanoimprinted polymer patterns are measured as a function of annealing temperature and time using a new metrology technique, Critical Dimension Small Angle X-ray Scattering (CD-SAXS). Periodicity, linewidth, line height, and sidewall

Effect of Initial Resist Thickness on Residual Layer Thickness of Nanoimprinted Structures

December 1, 2005
Author(s)
Hae-Jeong Lee, Hyun Wook Ro, Christopher L. Soles, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, Daniel R. Hines
Accurate quantification and control of the residual layer thickness is a critical challenge to achieving sub-50 nm patterning with nanoimprint lithography. While characterization to within a few nanometers is essential, there is currently a lack of

Rheopexy of Synovial Fluid and Protein Aggregation

September 5, 2005
Author(s)
Katherine Oates, Wendy Krause, Ronald L. Jones, R H. Colby
Bovine synovial fluid and albumin solutions of similar concentration are rheopectic (stress increases with time in steady shear). This unusual flow characteristic is caused by protein aggrega- tion, and the total stress is enhanced by entanglement of this